Download or read book CMOS Cantilever Sensor Systems written by D. Lange and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in order to make the microstructures smart and devise integrated microsystems with on-chip driving and signal conditioning circuitry - now known as CMOS MEMS or, with the arrival of nanostructures, CMOS NEMS. One way to achieve the merger is the post-processing micro- or nano- machining of finished CMOS wafers, some of which is described in this book. The book introduces this approach based on work carried out at the Physical Electronics Laboratory of ETH Zurich on arrays of cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of phys ical quantities such as forces and mass changes. The book is divided into three parts. First, general aspects of cantilever resona tors are introduced, e. g. their resonant behavior and possible driving and sensing mechanisms.
Download or read book CMOS MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Download or read book Integrated Chemical Microsensor Systems in CMOS Technology written by Andreas Hierlemann and published by Springer Science & Business Media. This book was released on 2005-08-29 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beginning with a comprehensive survey of existing semiconductor-based chemical microsensors and microsystems, this book proceeds to describe in detail CMOS technology-based chemical microsensor systems. The benefits of using CMOS technology for developing chemical microsensor systems and, in particular, monolithically integrated sensor systems comprising transducers and associated circuitry are laid out. Several successful realizations of such microsensor systems are presented. First, the fundamentals of the chemical sensing process itself will be elucidated, followed by a short description of microfabrication techniques and the CMOS substrate. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures and their applications is given. It is shown that CMOS-technology can be successfully used as platform technology to integrate microtransducers with the necessary driving and signal conditioning circuitry, and, in a next step, to develop monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces. The book concludes with a brief outlook to future developments, such as interfacing cells with CMOS microelectronics.
Download or read book CMOS Hotplate Chemical Microsensors written by Markus Graf and published by Springer Science & Business Media. This book was released on 2007-04-19 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Download or read book Smart Sensors and Systems written by Youn-Long Lin and published by Springer. This book was released on 2015-07-13 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes for readers technology used for effective sensing of our physical world and intelligent processing techniques for sensed information, which are essential to the success of the Internet of Things (IoTs). The authors provide a multidisciplinary view of sensor technology from MEMS, biological, chemical, and electrical domains and showcase smart sensor systems in real applications including smart home, transportation, medical, environmental, agricultural, etc. Unlike earlier books on sensors, this book provides a “global” view on smart sensors covering abstraction levels from device, circuit, systems, and algorithms.
Download or read book Subsurface Sensing written by Ahmet S. Turk and published by John Wiley & Sons. This book was released on 2011-07-06 with total page 916 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers with a solid understanding of the capabilities and limitations of the techniques used for buried object detection. Presenting theory along with applications and the existing technology, it covers the most recent developments in hardware and software technologies of sensor systems with a focus on primary sensors such as Ground Penetrating Radar (GPR) and auxiliary sensors such as Nuclear Quadruple Resonance (NQR). It is essential reading for students, practitioners, specialists, and academicians involved in the design and implementation of buried object detection sensors.
Download or read book DCIS2002 written by Salvador Bracho del Pino and published by Ed. Universidad de Cantabria. This book was released on 2002 with total page 756 pages. Available in PDF, EPUB and Kindle. Book excerpt: Este libro contiene las presentaciones de la XVII Conferencia de Diseño de Circuitos y Sistemas Integrados celebrado en el Palacio de la Magdalena, Santander, en noviembre de 2002. Esta Conferencia ha alcanzado un alto nivel de calidad, como consecuencia de su tradición y madurez, que lo convierte en uno de los acontecimientos más importantes para los circuitos de microelectrónica y la comunidad de diseño de sistemas en el sur de Europa. Desde su origen tiene una gran contribución de Universidades españolas, aunque hoy los autores participan desde catorce países
Download or read book Advanced Mechanical Models of DNA Elasticity written by Yakov M Tseytlin and published by Academic Press. This book was released on 2016-07-29 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced Mechanical Models of DNA Elasticity includes coverage on 17 different DNA models and the role of elasticity in biological functions with extensive references. The novel advanced helicoidal model described reflects the direct connection between the molecule helix structure and its specific properties, including nonlinear features and transitions. It provides an introduction to the state of the field of DNA mechanics, known and widely used models with their short analysis, as well as coverage on experimental methods and data, the influence of electrical, magnetic, ionic conditions on the persistence length, and dynamics with viscosity influence. It then addresses the need to understand the nature of the non-linear overstretching transition of DNA under force and why DNA has a negative twist-stretch coupling. Includes coverage of 17 contemporary models of DNA mechanics with analysis Provides comparison of DNA and RNA mechanical features Covers advances in experimental techniques including AFM, X-ray, and optical tweezers Contains extensive references for further reading
Download or read book Handbook of Force Transducers written by Dan Mihai Stefanescu and published by Springer Science & Business Media. This book was released on 2011-03-16 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.
Download or read book Chemical Sensors written by Ghenadii Korotcenkov and published by Momentum Press. This book was released on 2011-11-02 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical sensors are integral to the automation of myriad industrial processes, as well as everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This massive reference work will cover all major categories of chemical sensor materials and devices, and their general functional usage...from monitoring and analyzing gases, to analyzing liquids and compounds of all kinds. This is THE reference work on sensors used for chemical detection and analysis. In this final volume of the Chemical Sensors will be found the latest in new chemical sensor applications including remote chemical sensing for such applications as atmosphere monitoring , new uses for electronic "noses" and "tongues," wireless chemical sensors, and new future directions for chemical sensors in industry, agriculture, and transportation.
Download or read book Molecular Sensors and Nanodevices written by John X. J. Zhang and published by Academic Press. This book was released on 2018-11-19 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering, Second Edition is designed to be used as a foundational text, aimed at graduates, advanced undergraduates, early-career engineers and clinicians. The book presents the essential principles of molecular sensors, including theories, fabrication techniques and reviews. In addition, important devices and recently, highly-cited research outcomes are also cited. This differentiates the book from other titles on the market whose primary focus is more research-oriented and aimed at more of a niche market. Covers the fundamental principles of device engineering and molecular sensing, sensor theories and applications in biomedical science and engineering Introduces nano/micro fabrication techniques, including MEMS, bioMEMS, microTAS and nanomaterials science that are essential in the miniaturization of versatile molecular sensors Explores applications of nanomaterials and biomaterials, including proteins, DNAs, nanoparticles, quantum dots, nanotubes/wires and graphene in biomedicine
Download or read book CCD Image Sensors in Deep Ultraviolet written by Flora Li and published by Springer Science & Business Media. This book was released on 2006-01-05 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
Download or read book Piezoelectric Multilayer Beam Bending Actuators written by Rüdiger G. Ballas and published by Springer Science & Business Media. This book was released on 2007-03-06 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the application of piezoelectric materials, particularly piezoceramics, in the wide field of actuators and sensors. It gives a step-by-step introduction to the structure and mechanics of piezoelectric beam bending actuators in multilayer technology, which are of increasing importance for industrial applications. The book presents the suitability of the developed theoretical aspects in a memorable way.
Download or read book Capillary Forces in Microassembly written by Pierre Lambert and published by Springer Science & Business Media. This book was released on 2007-08-29 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capillary Forces in Microassembly discusses the use of capillary forces as a gripping principle in microscale assembly. Clearly written and well-organized, this text brings together physical concepts at the microscale with practical applications in micromanipulation. Throughout this work, the reader will find a review of the existing gripping principles, elements to model capillary forces as well as descriptions of the simulation and experimental test bench developed to study the design parameters. Using well-known concepts from surface science (such as surface tension, capillary effects, wettability, and contact angles) as inputs to mechanical models, the amount of effort required to handle micro-components is then predicted. Researchers and engineers involved in micromanipulation and precision assembly will find this a highly useful reference for microassembly system design and analysis.
Download or read book Thermal Transport for Applications in Micro Nanomachining written by Basil T. Wong and published by Springer Science & Business Media. This book was released on 2008-07-19 with total page 243 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining. The final chapter summarizes the important points and discusses directions for future work to improve the modeling of nanomachining.
Download or read book Implantable Sensors and Systems written by Guang-Zhong Yang and published by Springer. This book was released on 2018-03-27 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: Implantable sensing, whether used for transient or long-term monitoring of in vivo physiological, bio-electrical, bio-chemical and metabolic changes, is a rapidly advancing field of research and development. Underpinned by increasingly small, smart and energy efficient designs, they become an integral part of surgical prostheses or implants for both acute and chronic conditions, supporting optimised, context aware sensing, feedback, or stimulation with due consideration of system level impact. From sensor design, fabrication, on-node processing with application specific integrated circuits, to power optimisation, wireless data paths and security, this book provides a detailed explanation of both the theories and practical considerations of developing novel implantable sensors. Other topics covered by the book include sensor embodiment and flexible electronics, implantable optical sensors and power harvesting. Implantable Sensors and Systems – from Theory to Practice is an important reference for those working in the field of medical devices. The structure of the book is carefully prepared so that it can also be used as an introductory reference for those about to enter into this exciting research and developing field.
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
