Download or read book Chemical Vapor Deposition of Functional and Conformal Polymer Thin Films for the Formation and Modification of Nanostructures written by Priya Moni and published by . This book was released on 2018 with total page 167 pages. Available in PDF, EPUB and Kindle. Book excerpt: Autonomous mini- and microscale devices require the miniaturization of component devices such as on board integrated circuits (ICs) and electrochemical power sources. A paradigm shift to micro/nanostructured 3D geometries can enable high device performance within a small areal footprint. Fabrication of such devices requires processes to form structures in a material of interest and subsequently modify the structure with additional functional materials. This thesis explores the chemical vapor deposition (CVD) of polymer thin films to enable both the formation and modification of nanostructures. The CVD method allows for simultaneous polymer synthesis and thin film formation. The broad range of applications studied in this thesis all benefit from the single-step, in-situ control of the final polymer functionality and thin film properties enabled by the CVD of polymers. The first portion of this thesis studies the formation of nanostructures for ICs via the directed self-assembly (DSA) of block copolymers (BCPs). Initiated CVD (iCVD) is used to form cross-linked poly(divinyl benzene) (pDVB) films that control the orientation of self-assembled BCPs. The cross-linking mechanism of pDVB is first ascertained to form durable films. In-situ chemical modification of iCVD pDVB is then used to tune the final orientation of the selfassembled BCP film. A conformal iCVD pDVB film is then integrated into existing DSA processes to yield a nano-template that could be used to fabricate nanostructured ICs. The second portion of this thesis studies the modification of nanostructures by active and supporting materials used in electrochemical power systems. The iCVD process is used to develop conformal, solid polymer electrolytes, a supporting material for solid state lithium ion batteries. Out of several multi-vinyl cyclic chemistries, poly(tetravinyltetramethylcyclotetrasiloxane) (pV4D4) films displayed the highest ionic conductivity (10-7 S cm-1) and high conformality. Active materials for supercapacitors were developed using the oxidative chemical vapor deposition (oCVD) of conductive polymers. The oCVD process was used to control the crystallographic texture of poly(3,4-ethylenedioxythiophene) (PEDOT) thin films. Edge-on texture maximized the pseudocapacitive charge storage of this material. Conformal PEDOT thin films on micro-structured current collectors enabled higher energy densities in a high power, asymmetric supercapacitor.

Download or read book Functional Polymer Films 2 Volume Set written by Wolfgang Knoll and published by John Wiley & Sons. This book was released on 2013-02-12 with total page 1107 pages. Available in PDF, EPUB and Kindle. Book excerpt: Very thin film materials have emerged as a highly interesting and useful quasi 2D-state functionality. They have given rise to numerous applications ranging from protective and smart coatings to electronics, sensors and display technology as well as serving biological, analytical and medical purposes. The tailoring of polymer film properties and functions has become a major research field. As opposed to the traditional treatise on polymer and resin-based coatings, this one-stop reference is the first to give readers a comprehensive view of the latest macromolecular and supramolecular film-based nanotechnology. Bringing together all the important facets and state-of-the-art research, the two well-structured volumes cover film assembly and depostion, functionality and patterning, and analysis and characterization. The result is an in-depth understanding of the phenomena, ordering, scale effects, fabrication, and analysis of polymer ultrathin films. This book will be a valuable addition for Materials Scientists, Polymer Chemists, Surface Scientists, Bioengineers, Coatings Specialists, Chemical Engineers, and Scientists working in this important research field and industry.

Download or read book CVD Polymers written by Karen K. Gleason and published by John Wiley & Sons. This book was released on 2015-04-01 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt: The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insoluble materials including fluoropolymers, electrically conductive polymers, and highly crosslinked organic networks. Furthermore, CVD enables the coating of substrates which would otherwise dissolve or swell upon exposure to solvents. The scope of the book encompasses CVD polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and the resultant classes of materials. The third part focuses on the applications of these materials such as membrane modification and device fabrication. The final part discusses the potential for scale-up and commercialization of CVD polymers.

Download or read book Chemical Vapor Deposition Polymerization written by Jeffrey B. Fortin and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Download or read book Synthesis and Modification of Nanostructured Thin Films written by Ion N. Mihailescu and published by MDPI. This book was released on 2020-03-17 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Special Issue “Synthesis and Modification of Nanostructured Thin Films” highlights the recent progress in thin film synthesis/modification and characterization. New methods are reviewed for the synthesis and/or modification of thin films based on laser, magnetron, chemical, and other techniques. The obtained thin nanostructures are characterized by complex and complementary techniques. We think that most of proposed methods can be directly applied in production, but some others still need further elaboration for long-term prospective applications in lasers, optics, materials, electronics, informatics, telecommunications, biology, medicine, and probably many other domains. The Guest Editor and the MDPI staff are therefore pleased to offer this Special Issue to interested readers, including graduate and PhD students as well as postdoctoral researchers, but also to the entire community interested in the field of nanomaterials. We share the conviction that this can serve as a useful tool for updating the literature, but also to aid in the conception of new production and/or research programs. There is plenty of room for further dedicated R&D advances based on new instruments and materials under development.

Download or read book Enabling Integration of Vapor deposited Polymer Thin Films written by Christy Danielle Petruczok and published by . This book was released on 2014 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Initiated Chemical Vapor Deposition (iCVD) is a versatile, one-step process for synthesizing conformal and functional polymer thin films on a variety of substrates. This thesis emphasizes the development of tools to further enable the use of iCVD for industrial applications. The ability to pattern polymer thin films is a prerequisite for device fabrication. Two methods were developed for patterning iCVD polymers. The first technique facilitated patterning of nano- and microscale features of any iCVD thin film on planar surfaces. Retention of polymer functionality was demonstrated by incorporating the features into high-resolution resistive sensors. The second method adapted photolithographic techniques to achieve patterning on highly curved surfaces. Non-planar substrates were coated with a uniform layer of a functionalized, photoreactive iCVD polymer and exposed to ultraviolet light through a flexible mask. Exposed regions became insoluble in a developing solvent. The resolution and sensitivity of this iCVD-based negative photoresist were comparable to those of commercial products. Additionally, the patterned polymer was used as a mask for patterning metal on planar and curved surfaces. iCVD is typically a semi-continuous process. A batch process was investigated in order to minimize the use of expensive and corrosive reactants. The chemical functionality and conformality of the films were unaffected by the change in processing mode. Reaction yield was improved by one to two orders of magnitude for several film chemistries. iCVD is also unique in that it enables the deposition of cross-linked polymer films, which are difficult to create using conventional, solution-based methods. To potentially enhance durability, cross-linked poly(divinylbenzene) and poly(4-vinylpyridine-co-divinylbenzene) films were synthesized via iCVD. This is the first vapor-phase synthesis of the copolymer, which is a major component of many commercial ion exchange membranes. The degree of cross-linking was quantified using spectroscopic methods and was tightly controlled by adjusting the flow rate of divinylbenzene. Corresponding changes in the elastic moduli of the films were confirmed using nanoindentation. The first vapor-phase synthesis of poly(vinyl cinnamate) was also demonstrated. The cross-linking density of this polymer increases upon exposure to ultraviolet light and is readily quantifiable. Vinyl cinnamate was incorporated into a copolymer with N-isopropylacrylamide, yielding a temperature and light-responsive thin film.

Download or read book Multilayer Thin Films written by Gero Decher and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 543 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials scientists are often faced with the problem of modifying surfaces of objects, yet keeping their shape and properties. This book provides a detailed survey on the new technology of adsorption from solution for the fabrication of molecularly ordered multicomposite films in order to replace and expand on the well known Langmuir-Blodgett technology and to open the field of molecular self-assembly to materials and biosciences. The book is aimed at scientists who want to integrate several different functional entities in a single device. To this audience it presents the technique of layer-by-layer assembly as today's most powerful key technology, which is low cost, solution based and very robust. It is already beginning to make the transition from academic research into industrial mass production.

Download or read book Nanostructured Thin Films and Coatings written by Sam Zhang and published by CRC Press. This book was released on 2010-06-18 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films an

Download or read book Chemical Vapor Deposition for Nanotechnology written by Pietro Mandracci and published by BoD – Books on Demand. This book was released on 2019-01-10 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.

Download or read book Conformal Polymer Thin Films on Structurally Complex Surfaces by Initiated Chemical Vapor Deposition written by Chia-Yun (Sharon) Hsieh and published by . This book was released on 2016 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Initiated chemical vapor deposition (iCVD) is a novel CVD technique for forming polymer thin films. Compared to traditional thermal and plasma CVD methods, iCVD operates at low substrate temperature and low power conditions. This has the benefit of enabling well-defined reaction pathways for polymerization that lead to stoichiometric polymers. The iCVD approach has been investigated for many polymer chemistries and the resulting iCVD polymers have been shown to possess analogous structures and properties as bulk polymers from liquid phase synthesis. Among iCVD reactions, free radical polymerization is the most common, where vinyl monomers can be polymerized with peroxide free radical initiators. Recently, cationic ring opening polymerization via iCVD was demonstrated by applying boron trifluoride diethyl etherate as a cationic initiator for the polymerization of ethylene oxide. This work will demonstrate for the first time the iCVD synthesis of polyglycidol (PGL) via cationic ring opening polymerization of glycidol. iCVD PGL shows similar structure and properties as liquid-synthesized PGL reported in literature based on spectroscopic analysis. Furthermore, the iCVD deposition behavior under different modes of iCVD polymerization environment - surface-driven, gas-driven, and supersaturation - will be discussed for forming polyglycidol (PGL), poly(2-hydroxyethyl methacrylate) (PHEMA), poly(tetrafluoroethylene) (PTFE) and polyvinylpyrrolidone (PVP) coatings on structurally complex substrates, including nanopores, nanorods, and microstructures. Two major parameters Pm/Psat that represents the ratio of the partial pressure of the monomer to its saturation pressure, and Knudsen number (Kn) will be evaluated and related with the observed deposition behavior. Surface-driven iCVD of PGL and PHEMA have been found to conformally deposit in nanoporous TiO2 and microcatheters by carefully controlling Pm/Psat over a wide range of Kn. However, with gas-driven iCVD of PTFE, although conformal coatings have been achieved on micropillars and nanorods, coating within nanoporous networks at very large Kn was difficult even with careful control of Pm/Psat. It is believed that the PTFE polymerization is significantly driven by gas phase reactions that are not well controlled with a surface Pm/Psat parameter and, by moving to smaller and more confined features, the gas phase chemistries dominate and interfere with surface polymerization. By controlling Pm/Psat > 1, i.e. in a supersaturated monomer state, a recent iCVD processing discovery was made. Under supersaturation conditions, PVP was found to selectively grow on certain material surfaces and not others. This is believed to be due to differences in wettability of the monomer that dictates where the polymer grows, and enables directed patterning through iCVD. With the ability to deposit polymer coatings on different substrates, this work will illustrate a number of applications that highlight iCVD as an enabling technology. iCVD of PHEMA on ventricular catheters is found to be an effective coating for reducing undesired cell attachment in vitro by 77% after 17 days in cultured media compared to bare catheters, and so has the potential for improving catheter viability and reliability. iCVD of PTFE on silicon micropillars and nickel nanorod arrays is able to produce effective non-wetting (superhydrophobic) surface structures for enhancing latent heat transfer. iCVD of PGL in mesoporous TiO2 nanoparticle networks produces polymer nanocomposites with ultrahigh nanofiller loading (>80 wt%), offering a valuable platform for studying polymer nanocomposites with uniform and ultrahigh loading that exceed conventional processing limits (10-15 wt%) due to filler particle aggregation. As a result, the PGL glass transition temperature is found to increase significantly by 50-60 ℗ʻC compared to bulk PGL films without TiO2 nanofiller. The enhanced glass transition is attributed to appreciable hydrogen bonding interactions between PGL and TiO2.

Download or read book Catalytic Chemical Vapor Deposition written by Hideki Matsumura and published by John Wiley & Sons. This book was released on 2019-02-08 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: The authoritative reference on catalytic chemical vapor deposition, written by the inventor of the technology. This comprehensive book covers a wide scope of Cat-CVD and related technologies from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field, including the father of catalytic chemical vapor deposition, it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications. Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles Presents comparisons of different Cat-CVD methods which are usually not found in research papers Bridges academic and industrial research, showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry. Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies.

Download or read book Advanced Nano Deposition Methods written by Yuan Lin and published by John Wiley & Sons. This book was released on 2016-09-07 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.

Download or read book Nanoparticles and Nanostructured Films written by Janos H. Fendler and published by John Wiley & Sons. This book was released on 2008-11-21 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this concise handbook leading experts give a broad overview of the latest developments in this emerging and fascinating field of nano-sized materials. Coverage includes new techniques for the synthesis of nanoparticles as well as an in-depth treatment of their characterization and chemical and physical properties. The future applications of these advanced materials are also discussed. The wealth of information included makes this an invaluable guide for graduate students as well as scientists in materials science, chemistry or physics - looking for a comprehensive treatment of the topic.

Download or read book Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Download or read book Surface Modification of Polymers written by Jean Pinson and published by John Wiley & Sons. This book was released on 2019-12-04 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: A guide to modifying and functionalizing the surfaces of polymers Surface Modification of Polymers is an essential guide to the myriad methods that can be employed to modify and functionalize the surfaces of polymers. The functionalization of polymer surfaces is often required for applications in sensors, membranes, medicinal devices, and others. The contributors?noted experts on the topic?describe the polymer surface in detail and discuss the internal and external factors that influence surface properties. This comprehensive guide to the most important methods for the introduction of new functionalities is an authoritative resource for everyone working in the field. This book explores many applications, including the plasma polymerization technique, organic surface functionalization by initiated chemical vapor deposition, photoinduced functionalization on polymer surfaces, functionalization of polymers by hydrolysis, aminolysis, reduction, oxidation, surface modification of nanoparticles, and many more. Inside, readers will find information on various applications in the biomedical field, food science, and membrane science. This important book: -Offers a range of polymer functionalization methods for biomedical applications, water filtration membranes, and food science -Contains discussions of the key surface modification methods, including plasma and chemical techniques, as well as applications for nanotechnology, environmental filtration, food science, and biomedicine -Includes contributions from a team of international renowned experts Written for polymer chemists, materials scientists, plasma physicists, analytical chemists, surface physicists, and surface chemists, Surface Modification of Polymers offers a comprehensive and application-oriented review of the important functionalization methods with a special focus on biomedical applications, membrane science, and food science.

Download or read book Environmentally Focused Patterning and Processing of Polymer Thin Films by Initiated Chemical Vapor Deposition iCVD and Oxidative Chemical Vapor Deposition oCVD written by Nathan Jeffrey Trujillo and published by . This book was released on 2010 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: The new millennium has brought fourth many technological innovations made possible by the advancement of high speed integrated circuits. The materials and energy requirements for a microchip is orders of magnitude higher than that of "traditional" goods, and current materials management requirements for EHS friendly low-k processing require a 10% annual increase in raw materials utilization. Initiated Chemical Vapor Deposition (iCVD) is a low-energy, one step, solvent-free process for producing polymeric thin films This thesis describes the deposition of a novel low-k iCVD precursor, 1,3,5,7-tetravinyltetramethylcylcotetrasiloxane (V4D4). The high degree of organic content in the as-deposited film affords the ability to tune the film's properties by annealing. The incorporation of atmospheric oxygen at high temperatures enhances the mechanical and electrical properties of the films. Films annealed at 410'C have a dielectric constant of 2.15, hardness and modulus of 0.78 GPa and 5.4 GPa, respectively. These values are comparatively better than previously reported results for CVD low-k films. Environmentally friendly low-k processing encompasses materials and energy management in the entire integration process, including lithography. Colloidal lithography was combined with iCVD and capillary force lithography to create spatially addressable grafted polymer pattern nanostructures, without the need for expensive lithography tools. Using this method, we pattern our novel low dielectric constant polymer down to 25 nm without the need for environmentally harmful solvents. Furthermore, these grafted patterns were produced for a broad material set of functional organic, fluorinated, and silicon containing polymers. A variation of this process created amine functionalized biocompatible conducting polymer nanostructure patterns for biosensor applications. These were fabricated using grafting reactions between oxidative chemical vapor deposition (oCVD) PEDOT conducting polymers and amine functionalized polystyrene (PS) colloidal templates. Carboxylate containing oCVD copolymer patterns were used to immobilized fluorescent dyes. Fluorescent colloidal particles were assembled within dyed PEDOT-co-TAA copolymer nanobowl templates to create bifunctional patterns for optical data storage applications. Finally, UV and e-beam lithography were used to pattern covalently tethered vinyl monolayers for resist-free patterning of iCVD and oCVD polymers, using environmentally innocuous solvents.

Download or read book Principles of Vapor Deposition of Thin Films written by Professor K.S. K.S Sree Harsha and published by Elsevier. This book was released on 2005-12-16 with total page 1173 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.