Download or read book Chemical Mechanical Polishing 2001 Advances and Future Challenges Volume 671 written by Materials Research Society. Meeting and published by . This book was released on 2001-12-14 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This volume was first published in 2001.

Download or read book Chemical Mechanical Polishing 2001 Advances and Future Challenges written by Suryadevara V. Babu and published by Cambridge University Press. This book was released on 2014-06-05 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: With copper and barrier-layer integration firmly in place, several other exciting developments are occurring in the practice of chemical-mechanical polishing (CMP), and many advances are described in this book, first published in 2001. Discussions on CMP for shallow-trench isolation, abrasive-free slurries, improvements in pad and tool configurations including fixed abrasive pads, 'engineered' particles, effects of nanotopography, end-point studies, defect characterization and novel post-CMP cleaning methods are highlighted. Considerable progress has also been reported in modeling the complicated interactions that occur between the wafer surface and the pad and the slurry, whether containing abrasives or abrasive-free, and their influence on dishing and erosion and nonuniformity. These studies offer valuable insights for process improvements and yet many challenges remain and will provide a high level of interest for future books. Topics include: recent developments - pads and related issues; CMP abrasives; copper CMP/STI and planarization; STI and planarization - wear-rate models; low-k and integration issues - particle and process effects in CMP and issues in CMP cleaning.

Download or read book Chemical mechanical Polishing written by and published by . This book was released on 2001 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Chemical Mechanical Polishing Volume 816 written by Materials Research Society. Meeting and published by . This book was released on 2004-09 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of chemical-mechanical polishing (CMP).

Download or read book Advances in Materials Theory and Modeling Bridging Over Multiple Length and Time Scales Volume 677 written by Vasily Bulatov and published by . This book was released on 2001-09-20 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Computer simulations of materials are rapidly moving from the level of fundamental studies into the domain of industrial research and development tools. Papers in this book provide an extensive review of advances in materials theory and modeling by addressing new frontiers for theoretical and computational research on real materials, identifying crucial areas where experimental studies have or can be complemented by theory and simulation, and establishing a blueprint for further development of multiscale methods in computational materials science. A number of algorithms for boosting the simulation of time scale of atomistic systems have been introduced but they do not quite answer the need for a solid and widely applicable method. Topics include: mechanical properties, fracture and plasticity; radiation-matter interactions; polymers and macromolecules; multiresolution and multiscale methods - microstructural evolution; new methods for materials simulation; multi-time-scale methods and applications and large-scale ab initio calculations.

Download or read book Chemical Mechanical Polishing Fundamentals and Challenges Volume 566 written by S. V. Babu and published by . This book was released on 2000-02-10 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Si Front End Processing Volume 669 written by Erin C. Jones and published by . This book was released on 2001-12-14 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Dislocations and Deformation Mechanisms in Thin Films and Small Structures Volume 673 written by Oliver Kraft and published by . This book was released on 2001-09-20 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: The mechanical properties of small volumes of materials (such as thin films and patterned structures) can be very different from larger volumes, especially in the area of dislocation behavior. This text contains a selection of 31 papers from the April 2001 symposium devoted to new methods of dislocation modeling. Topics include mechanisms of plastic deformation in heteroepitaxial, multilayered, and polycrystalline thin films; as well as in 3D mesostructures such as epitaxial islands, semiconducting devices, and microcrystallites. The organizers of the symposium had the particular aim of stimulating exchange between experimental work, theoretical modeling, and numerical simulations. Annotation copyrighted by Book News Inc., Portland, OR.

Download or read book Luminescence and Luminescent Materials Volume 667 written by Peter C. Schmidt and published by . This book was released on 2001-10-15 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book II IV Compound Semiconductor Photovoltaic Materials Volume 668 written by Robert Birkmire and published by . This book was released on 2001-10-15 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on materials issues related to Cu(In,Ga)(Se,S)2 and CdTe-based polycrystalline thin-film photovoltaic solar cells and related oxides and chalcogenides. Phase equilibrium and thermochemical kinetic aspects of the absorber layer formation of CdTe and Cu(In,Ga)(Se,S)2 are emphasized and several papers on micro-analytical analysis report on detailed structural properties of thin films. The use of flexible plastic or metal foil substrates as an alternative to glass is addressed in terms of solar-cell performance and limitations imposed by the nature of the substrates. Properties of defects and interfaces in CdTe and CIGSS are highlighted using electrical, optical, and micro-analytical tools. While film properties are correlated to device physics, controversy still exists on the detailed operation of both CdTe and CIGSS devices. Topics include: materials and synthesis; thin films on alternate substrates; defects; growth and junction formation; surfaces and interfaces and film and device characterization.

Download or read book Organic Electronic and Photonic Materials and Devices Volume 660 written by Steven C. Moss and published by . This book was released on 2001-09-04 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Gate Stack and Silicide Issues in Silicon Volume 670 written by S. A. Campbell and published by . This book was released on 2002-02-26 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This volume was first published in 2002.

Download or read book Electronic Optical and Optoelectronic Polymers and Oligomers Volume 665 written by Ghassan E. Jabbour and published by . This book was released on 2002-06-03 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers from this four-day symposium include two talks from the 2000 Nobel Prize winners in chemistry, Professor Alan MacDiarmid and Professor Alan Heeger. The volume emphasizes the broad scientific and technological interest in applications of organic materials to electronics, optics, and optoelectronics. Materials synthesis and modification from the nanoscale to the mesoscale to the macroscale are discussed. Technological applications range from transistors and nanoelectronics, to light-emitting diodes, photovoltaics, photonic crystals, photodetectors, organic memories, and nonlinear optical materials. Topics include: electronic and optical properties; materials; devices; photovoltaics and transistors; self-assembly, nanostructures and printing; and growth and interfaces.

Download or read book Applications of Synchrotron Radiation Techniques to Materials Science IV Volume 678 written by P. G. Allen and published by . This book was released on 2001-11-13 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Much like earlier books in the series, this collection of papers, first published in 2001, brings together the materials science community and the characterization techniques that use synchrotron radiation.

Download or read book Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Volume 672 written by Jacques G. Amar and published by . This book was released on 2001-11-12 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions.

Download or read book Nanotubes Fullerenes Nanostructured and Disordered Carbon written by John Robertson and published by . This book was released on 2001 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering a range of topics in the science of carbon, these 41 papers from the April 2001 symposium discuss both ordered solids and molecules and disordered solids. Topics range form the sp2 bonded fullerenes and nanotubes to the sp3 bonded amorphous carbons and diamond. The papers are drawn from sessions addressing fullerenes, nanotube growth, nanotube properties, field emission, diamond like carbon, and diamond. Specific topics include designability of graphitic cones, physical interaction of carbon nanotubes and conjugated polymers, three-dimensional calculation of field emission from carbon nanotubes using a transfer-matrix methodology, and synthesis of ultrathin ta-C films by twist-filtered cathodic arc carbon plasmas. Annotation copyrighted by Book News Inc., Portland, OR.

Download or read book Gate Stack and Silicide Issues in Silicon Processing written by and published by . This book was released on 2002 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: