Download or read book Characterization of Carboxylic Acids on Hafnium Oxide Thin Films written by Peter William Ray and published by . This book was released on 2015 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hafnium Oxide thin films has had growing attention due hafnium oxide being used as a gate dielectric for MOSFET transistors and a potential next generation photoresist for sub 20 nm patterns. Extreme Ultra-Violet (EUV) lithography has been identified as the primary candidate technology for generation of sub-20 nm patterns. Current polymer based resists exhibit significant limitations at these resolutions due to high edge roughness, low etch resistance and high aspect ratio. Inorganic resists have gained much attention recently due to the high achievable resolution, high etch resistance and low edge roughness but generally suffer from low sensitivity to EUV photons. The low intensity of current EUV sources necessitates significantly higher sensitivity than what has been demonstrated for purely inorganic high resolution resists. A hybrid organic/inorganic approach shows significant promise for potential next generation resists by binding photo sensitive organic ligands onto a metal oxide to produce a negative tone photoresist. In this study we sought to characterize the sol-gel deposition of HfO2 thin films and the interactions of molecular and atomic species from carboxyl functionalized HfO2 thin film to gain insight into the thermal and radiation induced desorption characteristics that ultimately enable sensitivity improvement of inorganic films. Two different carboxylic acid ligands (Methacrylic Acid and Benzoic Acid were used in this surface characterization study. The Hafnium Oxide films with a self-assembled monolayer of carboxylic acids were characterized via ATR FT-IR, water droplet contact angle, X-ray photoelectron spectroscopy (XPS), Temperature Programed Desorption (TPD) and Electron Stimulated Desorption(ESD).

Download or read book Hafnium Oxide And Hafnium Silicate For High k Application written by Harish Bhandari and published by . This book was released on 2010-04 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Physical and Electrical Characterization of Hafnium Oxide Thin Films Deposited by Pulsed Laser Deposition Technique written by Bhanu P. Dharmaiahgari and published by . This book was released on 2004 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Characterization of Hafnium Oxide Films Formed Via Chemical and Physical Vapor Deposition written by Alvaro Padilla and published by . This book was released on 2007 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Hafnium Carbide Thin Films written by Wiriya Thongruang and published by . This book was released on 1997 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Fabrication and Characterization of Hafnium Oxide Films Prepared by Direct Sputtering written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: HKUST Call Number: Thesis ELEC 2003 Zhan.

Download or read book Characterization of Hafnium Based High K Thin Films for Solid State Transistor Gate Application Deposited by CVD and PECVD Using Hafnium IV Tert butoxide written by Harish Babu Bhandari and published by . This book was released on 2006 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Characterization of Thin Films of Silicon Rich Oxides written by Esther Maughan and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Characterization of Polycrystalline Tin Oxide Thin Films Before and After Immersion in Aqueous electrolyte Solutions written by Michael Jay Tarlov and published by . This book was released on 1987 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Yttrium Barium Copper Oxide Thin Films written by Richard Neil Steinberg and published by . This book was released on 1992 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical Properties of Athermally and Thermally Annealed Hafnium Oxide Thin Films on Silicon written by Heather Marie Cain and published by . This book was released on 2003 with total page 118 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Synthesis and Characterisation of Metal Oxide Thin Films written by D. Bhachu and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nanometric Structure property Relationship in Hafnium Oxide Thin Films Made by Sputter deposition written by Mirella Vargas and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Pyroelectric and Electrocaloric Effects in Hafnium Oxide Thin Films written by Clemens Mart and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1973 with total page 1256 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Recursor Design for the Atomic Layer Deposition ALD of Hafnium Oxide Thin Films written by Suneth Kalapugama and published by . This book was released on 2010 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Thin Films of Novel Functionalised 2 5 dithienylpyrrole Derivatives on Oxide Substrates written by Sonia Oberoi and published by . This book was released on 2005 with total page 230 pages. Available in PDF, EPUB and Kindle. Book excerpt: