Download or read book Carbure de silicium 4H et 3C written by Madyan Amer and published by . This book was released on 2012 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: L'objectif de cette thèse est d'étudier le comportement plastique du carbure de silicium dans le domaine fragile. A cette fin, des essais de déformation par micro et nanoindentation ont été réalisés sur des échantillons monocristallins de SiC (4H et 3C). Des couches homoépitaxiées de 4H-SiC de différents dopages électroniques ont été étudiées. Ces couches présentent des caractéristiques mécaniques différentes en fonction du dopage : le dopage de type p durcit le matériau par rapport au dopage de type n ou au matériau intrinsèque. De plus, l'analyse des courbes charge-enfoncement obtenue en nanoindentation montre que la nucléation des dislocations est plus difficile lorsque le matériau est dopé de type p par rapport au matériau dopé n ou intrinsèque. Ceci est confirmé par les microstructures de déformation observées en Microscopie Electronique en Transmission (MET). Les observations par MET montrent que les dislocations introduites à l'ambiante autour des empreintes sont parfaites et glissent dans les plans {0001} dans le 4H-SiC et dans les plans {111} dans le 3C-SiC. Elles sont orientées principalement le long de la direction vis. Les sites de nanoindentation à température ambiante des couches 4H homoepitaxiées ont été particulièrement étudiés. On met en évidence que les sites de nucléation des dislocations sont vraisemblablement situés dans les plans {1100}, les dislocations se développant par la suite dans le plan basal. La nature des cœurs des dislocations parfaites a été déterminée par la technique LACBED. Ces dislocations parfaites ont un cœur silicium en mode shuffle. Un changement de mécanisme de plasticité est observé par MET pour les échantillons indentés 800.
Download or read book SiC Power Materials written by Zhe Chuan Feng and published by Springer Science & Business Media. This book was released on 2004-06-09 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the 1950s Shockley predicted that SiC would quickly replace Si as a result of its superior material properties. In many ways he was right and today there is an active industry based on SiC, with new achievements being reported every year. This book reviews the progress achieved in SiC research and development, particularly over the past 10 years. It presents the essential properties of 3C-, 6H- and 4H-SiC polytypes including structural, electrical, optical, surface and interface properties; describes existing key SiC devices and also the challenges in materials growth and device fabrication of the 21st century. Overall it provides an up-to-date reference book suitable for a broad audience of newcomers, graduate students and engineers in industrial R&D.
Download or read book Radiation Effects in Silicon Carbide written by A.A. Lebedev and published by Materials Research Forum LLC. This book was released on 2017 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews the most interesting research concerning the radiation defects formed in 6H-, 4H-, and 3C-SiC under irradiation with electrons, neutrons, and some kinds of ions. The electrical parameters that make SiC a promising material for applications in modern electronics are discussed in detail. Specific features of the crystal structure of SiC are considered. It is shown that, when wide-bandgap semiconductors are studied, it is necessary to take into account the temperature dependence of the carrier removal rate, which is a standard parameter for determining the radiation hardness of semiconductors. The carrier removal rate values obtained by irradiation of various SiC polytypes with n- and p-type conductivity are analyzed in relation to the type and energy of the irradiating particles. The influence exerted by the energy of charged particles on how radiation defects are formed and conductivity is compensated in semiconductors under irradiation is analyzed. Furthermore, the possibility to produce controlled transformation of silicon carbide polytype is considered. The involvement of radiation defects in radiative and nonradiative recombination processes in SiC is analyzed. Data are also presented regarding the degradation of particular SiC electronic devices under the influence of radiation and a conclusion is made regarding the radiation resistance of SiC. Lastly, the radiation hardness of devices based on silicon and silicon carbide are compared.
Download or read book SiC Power Materials written by Zhe Chuan Feng and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the progress achieved in SiC research and development, particularly over the past 10 years. It presents the essential properties of 3C-, 6H- and 4H-SiC polytypes including structural, electrical, optical, surface and interface properties; describes existing key SiC devices and also the challenges in materials growth and device fabrication of the 21st century.
Download or read book Thermal Expansion and Thermal Expansion Anisotropy of the 3C 4H and 6H Polytypes of Silicon Carbide written by Zhuang Li and published by . This book was released on 1986 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Handbook of Silicon Carbide Materials and Devices written by Zhe Chuan Feng and published by CRC Press. This book was released on 2023-07-10 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook presents the key properties of silicon carbide (SiC), the power semiconductor for the 21st century. It describes related technologies, reports the rapid developments and achievements in recent years, and discusses the remaining challenging issues in the field. The book consists of 15 chapters, beginning with a chapter by Professor W. J. Choyke, the leading authority in the field, and is divided into four sections. The topics include presolar SiC history, vapor-liquid-solid growth, spectroscopic investigations of 3C-SiC/Si, developments and challenges in the 21st century; CVD principles and techniques, homoepitaxy of 4H-SiC, cubic SiC grown on 4H-SiC, SiC thermal oxidation processes and MOS interface, Raman scattering, NIR luminescent studies, Mueller matrix ellipsometry, Raman microscopy and imaging, 4H-SiC UV photodiodes, radiation detectors, and short wavelength and synchrotron X-ray diffraction. This comprehensive work provides a strong contribution to the engineering, materials, and basic science knowledge of the 21st century, and will be of interest to material growers, designers, engineers, scientists, postgraduate students, and entrepreneurs.
Download or read book Power Electronics Semiconductor Devices written by Robert Perret and published by John Wiley & Sons. This book was released on 2013-03-01 with total page 381 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book relates the recent developments in several key electrical engineering R&D labs, concentrating on power electronics switches and their use. The first sections deal with key power electronics technologies, MOSFETs and IGBTs, including series and parallel associations. The next section examines silicon carbide and its potentiality for power electronics applications and its present limitations. Then, a dedicated section presents the capacitors, key passive components in power electronics, followed by a modeling method allowing the stray inductances computation, necessary for the precise simulation of switching waveforms. Thermal behavior associated with power switches follows, and the last part proposes some interesting prospectives associated to Power Electronics integration.
Download or read book Piezoresistive Effect of p Type Single Crystalline 3C SiC written by Hoang-Phuong Phan and published by Springer. This book was released on 2017-04-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.
Download or read book Near Thermal Equilibrium Growth of 4H 6H and 15R silicon Carbide Single Crystals written by Norbert Schulze and published by . This book was released on 2001 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Silicon Carbide 2002 Materials Processing and Devices Volume 742 written by Stephen E. Saddow and published by . This book was released on 2003-03-25 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in silicon carbide materials, processing and device design have recently resulted in implementation of SiC-based electronic systems and offer great promise in high-voltage, high-temperature and high-frequency applications. This volume focuses on new developments in basic science of SiC materials as well as rapidly maturing device technologies. The challenges in this field include understanding and decreasing defect densities in bulk SiC crystals, controlling morphology and residual impurities in epilayers, optimization of implant activation and oxide-SiC interfaces, and developing novel device structures. This book brings together the crystal growers, physicists and device experts needed to continue the rapid pace of silicon-carbide-based technology. Topics include: epitaxial growth; characterization/defects; MOS technology; SiC processing and devices.
Download or read book Silicon Carbide and Advanced Materials written by Juraj Marek and published by Trans Tech Publications Ltd. This book was released on 2023-05-26 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Special topic volume with invited peer-reviewed papers only
Download or read book Thermoelectrical Effect in SiC for High Temperature MEMS Sensors written by Toan Dinh and published by Springer. This book was released on 2018-10-05 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
Download or read book Comptes rendus de l Acad mie des sciences written by and published by . This book was released on 2000 with total page 712 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Mesures des propri t s opto lectriques du carbure de silicium par d phasage micro onde et sensibilit spectrale written by Baptiste Berenguier and published by . This book was released on 2015 with total page 179 pages. Available in PDF, EPUB and Kindle. Book excerpt: Le carbure de silicium est un matériau semi-conducteur à grande bande d'énergie interdite possédant des propriétés exceptionnelles en termes de tenue en température, de résistance aux radiations, de stabilité chimique. En particulier il pourrait permettre la réalisation de détecteurs ultra-violet fonctionnant en environnement extrême (fortes températures et niveaux de radiations élevés) tels les environnements spatiaux. Le polytype 3C, avec un gap intermédiaire pourrait également être utilisé dans le domaine photovoltaïque. Le présent travail propose d'étudier le carbure de silicium à la fois sous l'aspect composant et sous l'aspect matériau. Une étude de la réponse spectrale de photodiodes UV (de type pn et Schottky) en fonction de la température et de l'irradiation est présentée. Un nouveau type de cellules solaires à hétérojonctions 3C-SiC/Si est étudié. Enfin, un système de mesure de la durée de vie des porteurs minoritaires dans le SiC-4H est réalisé et les résultats commentés.
Download or read book The Development of 3C SiC Interlayers for Diamond Deposition on Cemented Carbide Cutting Tools written by Ifakat Seda Erbaş and published by . This book was released on 2014-02-24 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book ETUDE DE LA REALISATION DE FILMS MINCES MONOCRISTALLINS DE CARBURE DE SILICIUM SUR ISOLANT SICOI PAR ADAPTATION DU PROCEDE IMPROVE written by YANNICK.. LE TIEC and published by . This book was released on 1998 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: LE MATERIAU SIC PRESENTE DES AVANTAGES POUR REALISER DES COMPOSANTS ELECTRONIQUES DE PUISSANCE, FONCTIONNANT EN HYPERFREQUENCE OU ENCORE POUR DES DISPOSITIFS OPERANT A HAUTE TEMPERATURE. L'UTILISATION DE CE MATERIAU EST LIMITEE PAR LE PRIX ELEVE ET LA FAIBLE TAILLE DES SUBSTRATS. UNE SOLUTION EST DE REPORTER UN FILM MINCE DE SIC SUR UN SUBSTRAT DE SILICIUM. POUR CELA, NOUS AVONS ADAPTE AU SIC LE PROCEDE IMPROVE DEVELOPPE POUR REALISER DES STRUCTURES SOI (SILICIUM SUR ISOLANT). LES ETAPES CLEFS DU PROCEDE, L'IMPLANTATION D'IONS HYDROGENE, LE COLLAGE PAR ADHESION MOLECULAIRE DE DEUX OXYDES SIO#2 ET LE RECUIT POUR TRANSFERER UNE COUCHE MINCE, ONT ETE ETUDIEES ET OPTIMISEES POUR REALISER UN MATERIAU SIC SUR ISOLANT (SICOI). UNE NOUVELLE APPROCHE CONCERNANT LA DIFFUSION DE L'HYDROGENE A HAUTE TEMPERATURE EST PROPOSEE ; ELLE PREND EN COMPTE LA CO-EXISTENCE DANS LE MATERIAU D'ESPECES H#+, H#0 ET H#, LES SITES CRISTALLINS PREFERENTIELS D'INSERTION DE L'HYDROGENE AINSI QUE LE ROLE DU DOPAGE ET DU POLYTYPE DU SIC UTILISE. PAR AILLEURS, LE MECANISME DE COLLAGE SIO#2/SIO#2 EST PRECISE. NOUS AVONS REALISE DES FILMS MINCES MONOCRISTALLINS DE SIC, D'EPAISSEURS VARIABLES, A PARTIR DES POLYTYPES SIC6H, 4H ET 3C SUR DES SUPPORTS SILICIUM OU CARBURE DE SILICIUM. LE MATERIAU FINI A ETE CARACTERISE PAR DES TECHNIQUES PHYSICO-CHIMIQUES, OPTIQUES ET ELECTRIQUES.
Download or read book Stress Analysis of Silicon Carbide Microelectromechanical Systems Using Raman Spectroscopy written by Stanley J. Ness and published by . This book was released on 2003-03-01 with total page 118 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling, or fracture. Government and industry are looking for ways to characterize the stress during the deposition of thin films in order to reduce or eliminate device failure. Micro-Raman spectroscopy has been successfully used to analyze poly-silicon MEMS devices made with the Multi-User MEMS Process (MUMPS trade name). Micro-Raman spectroscopy was selected because it is nondestructive, fast and has the potential for in situ stress monitoring. This research attempts to validate the use of Raman spectroscopy to analyze the stress in MEMS made of silicon carbide (SiC) using the Multi-User Silicon Carbide surface micromachining (MUSiCsm) process. Surface interferometry of fixed-fixed beam arrays and comb drive resonance test are employed to determine stress and compare it to the Raman values. Research also includes baseline spectra of 6H, 4H, and 15R poly-types of bulk SiC. Raman spectra of 1- to 2- micrometers thick 3C-SiC thin films deposited on silicon, silicon nitride, and silicon oxide substrates are presented as an attempt to establish a baseline spectra for 3C-SiC, the poly-type of SiC found in MEMS made with the MUSiCsm process.
