Download or read book Electron Beam Technology in Microelectronic Fabrication written by George Brewer and published by Elsevier. This book was released on 2012-12-02 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.

Download or read book Microcircuit Reliability Bibliography written by and published by . This book was released on 1978 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Passive RF and Microwave Integrated Circuits written by Leo Maloratsky and published by Elsevier. This book was released on 2003-12-01 with total page 385 pages. Available in PDF, EPUB and Kindle. Book excerpt: The growth in RF and wireless/mobile computing devices that operate at microwave frequencies has resulted in explosive demand for integrated circuits capable of operating at such frequencies in order to accomplish functions like frequency division, phase shifting, attenuation, and isolators and circulators for antennas. This book is an introduction to such ICs, combining theory and practical applications of those devices. In addition to this combined theory and application approach, the author discusses the critical importance of differing fabrication materials on the performance of ICs at different frequencies. This is an area often overlooked when choosing ICs for RF and microwave applications, yet it can be a crucial factor in how an IC performs in a given application. - Gives reader a solid background in an increasingly important area of circuit design - Emphasis on combination of theoretical discussions with practical application examples - In-depth discussion of critical, but often overlooked topic of different fabrication material performances at varying frequencies

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1972 with total page 1056 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book T I S C A Technical Information Indexes written by United States. Naval Air Systems Command and published by . This book was released on 1975 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Technical Information Indexes written by and published by . This book was released on 1975 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1988 with total page 1142 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book University of Michigan Official Publication written by University of Michigan and published by UM Libraries. This book was released on 1993 with total page 822 pages. Available in PDF, EPUB and Kindle. Book excerpt: Each number is the catalogue of a specific school or college of the University.

Download or read book Directory of Federal Laboratory and Technology Resources written by and published by DIANE Publishing. This book was released on 1994 with total page 727 pages. Available in PDF, EPUB and Kindle. Book excerpt: Describes the individual capabilities of each of 1,900 unique resources in the federal laboratory system, and provides the name and phone number of each contact. Includes government laboratories, research centers, testing facilities, and special technology information centers. Also includes a list of all federal laboratory technology transfer offices. Organized into 72 subject areas. Detailed indices.

Download or read book Publications of the National Institute of Standards and Technology Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1994 with total page 1162 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Download or read book Reconfigurable Circuits and Technologies for Smart Millimeter Wave Systems written by Philippe Ferrari and published by . This book was released on 2022-05-25 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: Describes the theory, modeling, and design of tunable mm-wave circuits and systems using CMOS, RF MEMS, and microwave liquid crystals.

Download or read book College of Engineering written by University of Michigan. College of Engineering and published by UM Libraries. This book was released on 1983 with total page 806 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Export Administration Regulations written by United States. Bureau of Export Administration and published by . This book was released on 2004 with total page 532 pages. Available in PDF, EPUB and Kindle. Book excerpt: