Download or read book Area selective Deposition of Ferromagnetic Cobalt Films written by Zizhuo Zhang and published by . This book was released on 2018 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cobalt is a classic ferromagnetic material and finds applications in magnetic random access memory devices. As an emerging patterning technique, area-selective atomic layer deposition (AS-ALD) of cobalt films has the advantages of low cost and low film damage compared with the current patterning approach of photolithography followed by etching of cobalt films. This research explores the routes to realize the AS-ALD of ferromagnetic cobalt films. Carbon-free Co films have been deposited on MgO(001) and SiO2/Si substrates by low temperature thermal ALD of CoO and subsequent low temperature atomic deuterium reduction of CoO. While high temperature D2 reduction of CoO results in rough and disconnected Co islands, low temperature D reduction of CoO produces smooth and continuous Co films. The Co films produced by low temperature D reduction exhibit a smaller coercivity than the Co films produced by high temperature D2 reduction. Reduction conditions affect the microstructure and the magnetic properties of the reduced Co films. The process-structure-property relationship has been elucidated. The increase of reduction temperature, partial pressure of deuterium, and reaction time increases the average grain size and coercivity of the reduced Co films. Co films that are grown on substrates with lower dewetting tendency, such as MgO and Al2O3, show smaller average grain size and smaller coercivity. Polystyrene (PS) has been proposed to work as a passivation material to realize the AS-ALD of cobalt films. PS is effective in inhibiting the nucleation and film growth of CoO on oxide substrates. Micro-patterns and nano-patterns of CoO have been grown by AS-ALD through PS templates produced by photolithography and PS templates created by directed self-assembly of diblock copolymer, respectively. CoO patterns can be further reduced to form Co patterns without deformation.

Download or read book Area Selective Deposition of Ultrathin Magnetic Cobalt Films Via Atomic Layer Deposition written by Himamshu Nallan and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Atomic Layer Deposition of Functional Materials written by Thong Quang Ngo and published by . This book was released on 2015 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic layer deposition (ALD) has emerged as an important technique for depositing thin films in both scientific research and industrial applications. The goal of this work is to integrate functional materials using ALD including high-[kappa] dielectric, LaAlO3, ferroelectric BaTiO3, photocatalytic CoO, and room temperature ferromagnetic thin films of Co metal for spin-transfer torque random-access memory applications. The work is also to demonstrate the formation of a quasi-two-dimensional electron gas (2-DEG) at the [gamma]-Al2O3/SrTiO3 heterointerface enabling a method for all-oxide device manufacturing using ALD. High permittivity oxide thin films are needed to replace SiO2 in complementary metal oxide semiconductor (CMOS) transistors. The replacement of SiO2 by hafnium oxide-based high-[kappa] materials in CMOS devices in 2007 was a revolutionary development in semiconductor front end of line. The continued device feature shrinking requires higher-[kappa] dielectrics, compared to HfO2-based materials. Crystalline perovskite oxides, such as SrTiO3, LaAlO3, and BaTiO3, etc. have from high to very high dielectric constant and being proposed to replace HfO2-based materials in CMOS devices if the leakage problem is resolved. The work explores the monolithic integration of crystalline perovskite oxide films with Si(001) using combined molecular beam epitaxy (MBE) and ALD techniques. Four unit cells of SrTiO3 were grown directly on Si(001) by MBE and transferred in-situ into the ALD chamber for further depositions. The integration of oxide thin films on Si(001) using the MBE-ALD technique allows us to maintain clean oxide/Si(001) interfaces since low temperatures (180-250 °C) were maintained during the ALD deposition. The goal of my work is also to explore processes to enable area selective deposition of cobalt (II) oxide, CoO. The effectiveness of poly(trimethylsilylstyrene) in selectively inhibiting surface nucleation of CoO on SiO2 and MgO substrates is demonstrated. Carbon-free cobalt thin films are formed by reducing CoO using Al and Sr metals to scavenge oxygen from CoO. The work explores the ability to control the structure and morphology of the resultant cobalt film by tuning the reduction conditions, allowing us to tune magnetic properties of the cobalt thin film. My work also focuses on the growth of [gamma]-Al2O3 on the TiO2-terminated SrTiO3 substrate at temperatures higher than 300 °C. The formation of a quasi-2-DEG is found at the [gamma]-Al2O3/TiO2-terminated SrTiO3 interface. In-situ x-ray photoelectron spectroscopy reveals the presence of Ti3+ feature at the heterointerface. Conductivity at the interface was found to be proportional to the amount of Ti3+ species. Oxide quasi-2-DEG might provide opportunities for new generations of all-oxide electronic devices using ALD.

Download or read book Area Selective Deposition of Dielectric and Metal Thin Films by Controlled Nucleation During Atomic Layer Deposition and Etching written by Seung Keun Song and published by . This book was released on 2021 with total page 143 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Effect of Non ferromagnetic Overlayers on Cobalt Thin Films written by Rajesh S. Nair and published by . This book was released on 1986 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Multilevel Interconnect Technology written by and published by . This book was released on 1999 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book New Developments in Materials Science Research written by B. M. Caruta and published by Nova Publishers. This book was released on 2007 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials science includes those parts of chemistry and physics that deal with the properties of materials. It encompasses four classes of materials, the study of each of which may be considered a separate field: metals; ceramics; polymers and composites. Materials science is often referred to as materials science and engineering because it has many applications. Industrial applications of materials science include processing techniques (casting, rolling, welding, ion implantation, crystal growth, thin-film deposition, sintering, glassblowing, etc.), analytical techniques (electron microscopy, x-ray diffraction, calorimetry, nuclear microscopy (HEFIB) etc.), materials design, and cost/benefit tradeoffs in industrial production of materials. This book presents new research directions in a very new field which happens to be an old field as well.

Download or read book Polycrystalline Metal and Magnetic Thin Films written by and published by . This book was released on 1999 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Investigation of the Cobalt Distribution in the Room Temperature Ferromagnetic Nanocomposite TIO 2CO Thin Films written by Cody Apolonio Gonzalez and published by . This book was released on 2016 with total page 18 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Reactive Deposition of Pure and Alloyed Cobalt and Nickel Thin Films from Supercritical Carbon Dioxide Solutions written by Ephrem T. Hunde and published by . This book was released on 2004 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Journal of the Electrochemical Society written by and published by . This book was released on 2009 with total page 1020 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Polymer Science A Comprehensive Reference written by and published by Newnes. This book was released on 2012-12-05 with total page 7752 pages. Available in PDF, EPUB and Kindle. Book excerpt: The progress in polymer science is revealed in the chapters of Polymer Science: A Comprehensive Reference, Ten Volume Set. In Volume 1, this is reflected in the improved understanding of the properties of polymers in solution, in bulk and in confined situations such as in thin films. Volume 2 addresses new characterization techniques, such as high resolution optical microscopy, scanning probe microscopy and other procedures for surface and interface characterization. Volume 3 presents the great progress achieved in precise synthetic polymerization techniques for vinyl monomers to control macromolecular architecture: the development of metallocene and post-metallocene catalysis for olefin polymerization, new ionic polymerization procedures, and atom transfer radical polymerization, nitroxide mediated polymerization, and reversible addition-fragmentation chain transfer systems as the most often used controlled/living radical polymerization methods. Volume 4 is devoted to kinetics, mechanisms and applications of ring opening polymerization of heterocyclic monomers and cycloolefins (ROMP), as well as to various less common polymerization techniques. Polycondensation and non-chain polymerizations, including dendrimer synthesis and various "click" procedures, are covered in Volume 5. Volume 6 focuses on several aspects of controlled macromolecular architectures and soft nano-objects including hybrids and bioconjugates. Many of the achievements would have not been possible without new characterization techniques like AFM that allowed direct imaging of single molecules and nano-objects with a precision available only recently. An entirely new aspect in polymer science is based on the combination of bottom-up methods such as polymer synthesis and molecularly programmed self-assembly with top-down structuring such as lithography and surface templating, as presented in Volume 7. It encompasses polymer and nanoparticle assembly in bulk and under confined conditions or influenced by an external field, including thin films, inorganic-organic hybrids, or nanofibers. Volume 8 expands these concepts focusing on applications in advanced technologies, e.g. in electronic industry and centers on combination with top down approach and functional properties like conductivity. Another type of functionality that is of rapidly increasing importance in polymer science is introduced in volume 9. It deals with various aspects of polymers in biology and medicine, including the response of living cells and tissue to the contact with biofunctional particles and surfaces. The last volume is devoted to the scope and potential provided by environmentally benign and green polymers, as well as energy-related polymers. They discuss new technologies needed for a sustainable economy in our world of limited resources. Provides broad and in-depth coverage of all aspects of polymer science from synthesis/polymerization, properties, and characterization methods and techniques to nanostructures, sustainability and energy, and biomedical uses of polymers Provides a definitive source for those entering or researching in this area by integrating the multidisciplinary aspects of the science into one unique, up-to-date reference work Electronic version has complete cross-referencing and multi-media components Volume editors are world experts in their field (including a Nobel Prize winner)

Download or read book Area Selective Chemical Vapor Deposition of Metallic Films Using Plasma Electrons as Reducing Agents written by Hama Nadhom and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Functional Nanostructures Fabricated by Focused Electron Ion Beam Induced Deposition written by Rosa Córdoba Castillo and published by Springer Science & Business Media. This book was released on 2013-10-08 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis constitutes a detailed study of functional nanostructures (ferromagnetic, superconducting, metallic and semiconducting) fabricated by focused electron/ion beam induced deposition techniques. The nanostructures were grown using different precursor materials such as Co2(CO)8, Fe2(CO)9, W(CO)6, (CH3)3Pt(CpCH3) and were characterized by a wide range of techniques. This work reports results obtained for the morphology, the microstructure, the composition, the electrical transport mechanism, magnetic and superconducting properties of nanostructures. The results offers exciting prospects in a wide range of applications in nanotechnology and condensed matter physics.

Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1420 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book TMS 2021 150th Annual Meeting Exhibition Supplemental Proceedings written by Minerals, Metals and Materials Society. Annual Meeting and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This collection presents papers from the 150th Annual Meeting & Exhibition of The Minerals, Metals & Materials Society.

Download or read book Recent Advances in Thin Films written by Sushil Kumar and published by Springer Nature. This book was released on 2020-08-27 with total page 721 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New Delhi, India. Thin film research has become increasingly important over the last few decades owing to the applications in latest technologies and devices. The book focuses on current advances in thin film deposition processes and characterization including thin film measurements. The chapters cover different types of thin films like metal, dielectric, organic and inorganic, and their diverse applications across transistors, resistors, capacitors, memory elements for computers, optical filters and mirrors, sensors, solar cells, LED's, transparent conducting coatings for liquid crystal display, printed circuit board, and automobile headlamp covers. This book can be a useful reference for students, researchers as well as industry professionals by providing an up-to-date knowledge on thin films and coatings.