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Book Analysis of the Surface Structure of HFCVD Diamond Films

Download or read book Analysis of the Surface Structure of HFCVD Diamond Films written by and published by . This book was released on 1995 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Diamond Films

    Book Details:
  • Author : Koji Kobashi
  • Publisher : Elsevier
  • Release : 2010-07-07
  • ISBN : 0080525571
  • Pages : 350 pages

Download or read book Diamond Films written by Koji Kobashi and published by Elsevier. This book was released on 2010-07-07 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: - Discusses the most advanced techniques for diamond growth - Assists diamond researchers in deciding on the most suitable process conditions - Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.

Book Interfacial Properties in the Deposition of Diamond Films by Combustion Assisted CVD

Download or read book Interfacial Properties in the Deposition of Diamond Films by Combustion Assisted CVD written by Sunghyun Baek and published by . This book was released on 2001 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combustion flame assisted CVD of diamond has been carried out on variety of substrates to examine the mechanism of nucleation and growth and the role of the interface in this process. Initial studies were carried out on native oxide covered Si (100), and Si (100) with thin thermal oxide films (100 nm, 200 nm). After pretreatment under reducing flame conditions, a SiC layer, identified by X-ray Photoelectron Spectroscopy, was produced on all three substrates. The SiC/SiO2 ratio varied systematically with deposition time. Atomic Force Microscopy (AFM) suggests SiC particles were randomly distributed over the substrates early in the nucleation phase. Pretreatments in the fuel rich flame induce SiC formation after an induction time dictated by the thickness of the oxide film. Following SiC formation, diamond crystals, detected by photoelectron spectroscopy and Micro-Raman spectroscopy, can be grown on all three substrates with similar growth rates. In a laser pyrolysis study, with the subsequent deposition of diamond films in mind, the laser powered decompositions of silacyclobutane (SCB). 1,3-disilacyclobutane (DSCB) have been investigated. By changing the deposition conditions and the mixing ratio of the precursors, amorphous silicon carbide CVD films (Si1-xCx) have been deposited as buffer layers for subsequent diamond film deposition. Atomic Force Microscopy (AFM) shows that the deposits consist of very uniform films. XPS shows the stoichiometry of the deposits obtained from SCB and DSCB are SiC2.4O0.3 and SiC1.1O0.2 respectively. The laser pyrolysis technique has the advantages of producing desirable and controllable Si/C stoichiometry at lower deposition temperatures than conventional CVD methods. However, the instability of the films on exposure to air makes the method unsuitable as a precursor to CA-CVD diamond deposition. In the last part of thesis, the role of carbide and oxy-carbide films in the adhesion of CA-CVD deposited diamond films on commercial pure Ti metal, and a Ti, 6%Al,4%V substrates was examined. It was found that the carbon to oxygen ratio in an oxy-carbide structure formed at the interface broadly correlates with the adhesive strength of the diamond/substrate bond. Deposition experiments suggest the nature of the substrate is important in aiding carbide and subsequently diamond formation. The formation of a stable carbide clearly assists in the nucleation phase and in enhancing bonding at the interface, but it is far from clear that it is an essential precursor to the formation of diamond. Rather it appears to act to stabilize the substrate surface while diamond growth is established. SIMS depth profiles also show that the interfacial surface on Ti-6Al-4V contains several percent of aluminium and nitrogen, both at the outermost surface and in the interior of the interfacial layer. The aluminum is enriched at the surface as compared with the bulk concentration, and diamond nucleation is accelerated on this surface relative to pure Ti- These experiments with CA-CVD diamond deposition confirm that despite the very different gas composition used in diamond deposition, the initial mechanisms of nucleation and growth are very similar to those observed in other CVD diamond growth technologies. The major difference is the much higher rate at which these steps occur. This has made it a significant challenge to examine the nature and role of the interface in these experiments. It is clear that this zone is critical in controlling adhesion and growth of diamond on the various substrates used.

Book Diamond Films Handbook

Download or read book Diamond Films Handbook written by Jes Asmussen and published by CRC Press. This book was released on 2002-01-23 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it includes specific chapters that address film characterization methods and the physics and chemistry of film synthesis. Other topics include deposition chemistry, various techniques for diamond synthesis, diamond heat spreaders, thermal management diamond active electronic devices, and diamond film optics.

Book Physics and Applications of CVD Diamond

Download or read book Physics and Applications of CVD Diamond written by Satoshi Koizumi and published by John Wiley & Sons. This book was released on 2008-09-08 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here, leading scientists report on why and how diamond can be optimized for applications in bioelectronic and electronics. They cover such topics as growth techniques, new and conventional doping mechanisms, superconductivity in diamond, and excitonic properties, while application aspects include quantum electronics at room temperature, biosensors as well as diamond nanocantilevers and SAWs. Written in a review style to make the topic accessible for a wider community of scientists working in interdisciplinary fields with backgrounds in physics, chemistry, biology and engineering, this is essential reading for everyone working in environments that involve conventional electronics, biotechnology, quantum computing, quantum cryptography, superconductivity and light emission from highly excited excitonic systems.

Book Thin Film Diamond I

Download or read book Thin Film Diamond I written by Christopher Nebel and published by Academic Press. This book was released on 2003-12-12 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume reviews the state of the art of thin film diamond, a very promising new semiconductor that may one day rival silicon as the material of choice for electronics. Diamond has the following important characteristics; it is resistant to radiation damage, chemically inert and biocompatible and it will become "the material" for bio-electronics, in-vivo applications, radiation detectors and high-frequency devices. Thin-Film Diamond is the first book to summarize state of the art of CVD diamond in depth. It covers the most recent results regarding growth and structural properties, doping and defect characterization, hydrogen in and on diamond as well as surface properties in general, applications of diamond in electrochemistry, as detectors, and in surface acoustic wave devices.· Accessible by both experts and non-experts in the field of semi-conductors research and technology, each chapter is written in a tutorial format· Helping engineers to manufacture devices with optimized electronic properties· Truly international, this volume contains chapters written by recognized experts representing academic and industrial institutions from Europe, Japan and the US

Book Low Pressure Synthetic Diamond

Download or read book Low Pressure Synthetic Diamond written by Bernhard Dischler and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 383 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

Book Diamond and Diamond like Films and Coatings

Download or read book Diamond and Diamond like Films and Coatings written by Robert E. Clausing and published by Springer. This book was released on 1991 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond films grown by activated chemical vapor deposition have superlative thermal, mechanical, optical, and electronic properties combined with a very high degree of chemical inertness to most environments. These properties, together with the ability to fabricate films and shapes of considerable size, promise an exciting new material with many applications. Some applications are on the verge of commercialization but many await a few more technological developments. Diamond-like films are already employed in both commercial and military applications. The popular press, as well as the scientific and technological and industrial communities, are increasingly interested in the potential for future development of these materials. Although there are many technical papers and review articles published, there is no Single comprehensive introduction to these technologies. The Scientific Affairs Division of NATO recognized the need and the future importance of these technologies and authorized an Advanced Study Institute on diamond and diamond-like films. NATO Advanced Study Institutes are high level teaching activities at which a carefully defined subject is presented in a systematic and coherently structured program. The subject is treated in considerable depth by lecturers eminent in their fields and of international standing. The presentations are made to students who are scientists in the field or who possess an advanced general scientific background.

Book Diamond Chemical Vapor Deposition

Download or read book Diamond Chemical Vapor Deposition written by Huimin Liu and published by William Andrew. This book was released on 1995 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scope of the present book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and a review of the various processing techniques used in diamond CVD. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described.

Book Thin Film Diamond

    Book Details:
  • Author : A.H. Lettington
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 9401107254
  • Pages : 160 pages

Download or read book Thin Film Diamond written by A.H. Lettington and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.

Book Electron Microscopy and Analysis 2001

Download or read book Electron Microscopy and Analysis 2001 written by M. Aindow and published by CRC Press. This book was released on 2001-12-01 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron microscopy is now a mainstay characterization tool for solid state physicists and chemists as well as materials scientists. Electron Microscopy and Analysis 2001 presents a useful snapshot of the latest developments in instrumentation, analysis techniques, and applications of electron and scanning probe microscopies. The book is ideal for

Book Proceedings of the Fifth International Symposium on Diamond Materials

Download or read book Proceedings of the Fifth International Symposium on Diamond Materials written by Electrochemical Society. Meeting and published by The Electrochemical Society. This book was released on 1998 with total page 718 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Handbook of Industrial Diamonds and Diamond Films

Download or read book Handbook of Industrial Diamonds and Diamond Films written by Mark A. Prelas and published by Routledge. This book was released on 2018-12-19 with total page 1232 pages. Available in PDF, EPUB and Kindle. Book excerpt: Examines both mined and synthetic diamonds and diamond films. The text offers coverage on the use of diamond as an engineering material, integrating original research on the science, technology and applications of diamond. It discusses the use of chemical vapour deposition grown diamonds in electronics, cutting tools, wear resistant coatings, thermal management, optics and acoustics, as well as in new products.

Book Diamond Films and Coatings

Download or read book Diamond Films and Coatings written by Robert F. Davis and published by William Andrew. This book was released on 1993 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reviews diamond films and coatings covering their properties, growth, deposition, characterization, and applications.

Book Growth and Characterization of Diamond Thin Films

Download or read book Growth and Characterization of Diamond Thin Films written by Sattar Mirzakuchaki and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposited (CVD) diamond thin films grown homoepitaxially as well as on non-diamond substrates have been the subject of intense investigation since the beginning of the last decade. Diamond's remarkable properties such as physical hardness, chemical inertness, high thermal conductivity, high breakdown voltage, and high carrier mobility are the main factors for the attention it has received from many researchers around the world. Although these properties are somewhat degraded in polycrystalline diamond films, they are still superior to many other materials. One of the most potentially useful applications of diamond thin films is in the semiconductor industry. Although a few prototype devices such as field effect transistors and Schottky diodes have been fabricated on diamond, some major obstacles remain to be overcome before full scale commercial applications of diamond as a semiconductor is possible. The high cost of large area monocrystalline diamond substrates has forced researchers to look for alternative substrates for the heteroepitaxial growth of diamond. So far only marginal results have been reported on the growth of highly oriented diamond films and on the heteroepitaxial growth involving substrates that are as costly as diamond. Silicon, as the dominant material in semiconductor industry, has been the subject of much research as a substrate for the growth of polycrystalline diamond. Another problem in development of diamond as a semiconductor is the effective doping of diamond, particularly for n-type conductivity. Although many researchers have studied boron-doped (p-type) diamond thin films in the past several years, there have been few reports on the effects of doping diamond films with phosphorous (n-type). Once these two issues have been solved, other fabrication steps such as oxidation, etching, masking, etc. may be attempted. The present work is a study directed toward solving some of these problems by looking at in-situ doping of n-type hot filament CVD (HFCVD) grown diamond films on silicon substrates. The study includes electrical characterization, stable metallic contacts, effect of silicon substrate surface pretreatment, and selective area deposition. A number of different techniques for inducing diamond nucleation on Si substrates are studied and the resulting diamond films characterized by common techniques such as Raman spectroscopy, X-ray diffraction, optical and scanning electron microscopy, and profilometery. The effect of doping the diamond films with different concentrations of phosphorous as well as calculation of the activation energy by temperature measurement was also carried out in this work. A new technique is presented for the selective deposition of diamond films onto silicon substrates.

Book Structure Of Surfaces Iv  The   Proceedings Of The 4th International Conference On The Structure Of Surfaces

Download or read book Structure Of Surfaces Iv The Proceedings Of The 4th International Conference On The Structure Of Surfaces written by X D Xie and published by World Scientific. This book was released on 1994-06-22 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Fourth International Conference on the Structure of Surfaces provides a forum for the report of new results and less the review of the status of surface structure and the relationship between surface and interface structure and physical or chemical properties of interest. Also within the scope of the meeting are novel experimental and theoretical approaches for the determination of surface and interface structures, computer simulation of dynamic processes and new developments in instrumentation.

Book Diamond  Electronic Properties and Applications

Download or read book Diamond Electronic Properties and Applications written by Lawrence S. Pan and published by Springer Science & Business Media. This book was released on 1994-12-31 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of diamond for electronic applications is not a new idea. As early as the 1920's diamonds were considered for their use as photoconductive detectors. However limitations in size and control of properties naturally limited the use of diamond to a few specialty applications. With the development of diamond synthesis from the vapor phase has come a more serious interest in developing diamond-based electronic devices. A unique combination of extreme properties makes diamond partiCularly well suited for high speed, high power, and high temperature applications. Vapor phase deposition of diamond allows large area films to be deposited, whose properties can potentially be controlled. Since the process of diamond synthesis was first realized, great progress have been made in understanding the issues important for growing diamond and fabricating electronic devices. The quality of both intrinsic and doped diamond has improved greatly to the point that viable applications are being developed. Our understanding of the properties and limitations has also improved greatly. While a number of excellent references review the general properties of diamond, this volume summarizes the great deal of literature related only to electronic properties and applications of diamond. We concentrate only on diamond; related materials such as diamond-like carbon (DLC) and other wide bandgap semiconductors are not treated here. In the first chapter Profs. C. Y. Fong and B. M. Klein discuss the band structure of single-crystal diamond and its relation to electronic properties.