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Book Handbook of Critical Dimension Metrology and Process Control

Download or read book Handbook of Critical Dimension Metrology and Process Control written by Kevin M. Monahan and published by SPIE-International Society for Optical Engineering. This book was released on 1994 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book Handbook of Charged Particle Optics

Download or read book Handbook of Charged Particle Optics written by Jon Orloff and published by CRC Press. This book was released on 2017-12-19 with total page 666 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.

Book Failure Analysis

Download or read book Failure Analysis written by Jose Luis Otegui and published by Springer Science & Business Media. This book was released on 2014-01-02 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses the failures of structural elements, i.e. those components whose primary mission is to withstand mechanical loads. The book is intended as a self-contained source for those with different technical grades, engineers and scientists but also technicians in the field can benefit from its reading.

Book High Resolution Transmission Electron Microscopy Calibration of Critical Dimension CD Reference Materials

Download or read book High Resolution Transmission Electron Microscopy Calibration of Critical Dimension CD Reference Materials written by and published by . This book was released on 1999 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: NIST and Sandia have developed a procedure for producing and calibrating critical dimension (CD), or linewidth, reference materials. These reference materials will be used to calibrate metrology instruments used in semiconductor manufacturing. The artifacts, with widths down to 100 nm, are produced in monocrystalline silicon with all feature edges aligned to specific crystal planes. A two-part calibration of these linewidths is used: the primary calibration, with accuracy to within a few lattice plane thicknesses, is accomplished by counting the lattice planes across the sample as-imaged through use of high-resolution transmission electron microscopy (HRTEM). The secondary calibration is the high-precision electrical CD technique. NIST and Sandia are developing critical dimension (CD), or linewidth, reference materials for use by the semiconductor industry. To meet the current requirements of this rapidly changing industry, the widths of the reference features must be at or below the widths of the finest features in production and/or development. Further, these features must produce consistent results no matter which metrology tool (e.g., scanning electron microscope, scanned probe microscope, electrical metrology) is used to make the measurement. This leads to a requirement for the samples to have planar surfaces, known sidewall angles, and uniform material composition. None of the production techniques in use in semiconductor manufacturing can produce features with all these characteristics. In addition, requirements specified in the National Technology Roadmap for Semiconductors indicate that the width of the feature must be accurately calibrated to approximately 1-2 nm, a value well beyond the current capabilities of the instruments used for semiconductor metrology.

Book Modeling Nanoscale Imaging in Electron Microscopy

Download or read book Modeling Nanoscale Imaging in Electron Microscopy written by Thomas Vogt and published by Springer Science & Business Media. This book was released on 2012-03-02 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modeling Nanoscale Imaging in Electron Microscopy presents the recent advances that have been made using mathematical methods to resolve problems in microscopy. With improvements in hardware-based aberration software significantly expanding the nanoscale imaging capabilities of scanning transmission electron microscopes (STEM), these mathematical models can replace some labor intensive procedures used to operate and maintain STEMs. This book, the first in its field since 1998, will also cover such relevant concepts as superresolution techniques, special denoising methods, application of mathematical/statistical learning theory, and compressed sensing.

Book Springer Handbook of Microscopy

Download or read book Springer Handbook of Microscopy written by Peter W. Hawkes and published by Springer Nature. This book was released on 2019-11-02 with total page 1561 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book features reviews by leading experts on the methods and applications of modern forms of microscopy. The recent awards of Nobel Prizes awarded for super-resolution optical microscopy and cryo-electron microscopy have demonstrated the rich scientific opportunities for research in novel microscopies. Earlier Nobel Prizes for electron microscopy (the instrument itself and applications to biology), scanning probe microscopy and holography are a reminder of the central role of microscopy in modern science, from the study of nanostructures in materials science, physics and chemistry to structural biology. Separate chapters are devoted to confocal, fluorescent and related novel optical microscopies, coherent diffractive imaging, scanning probe microscopy, transmission electron microscopy in all its modes from aberration corrected and analytical to in-situ and time-resolved, low energy electron microscopy, photoelectron microscopy, cryo-electron microscopy in biology, and also ion microscopy. In addition to serving as an essential reference for researchers and teachers in the fields such as materials science, condensed matter physics, solid-state chemistry, structural biology and the molecular sciences generally, the Springer Handbook of Microscopy is a unified, coherent and pedagogically attractive text for advanced students who need an authoritative yet accessible guide to the science and practice of microscopy.

Book Report of Investigations

Download or read book Report of Investigations written by and published by . This book was released on 1991 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Transport of Energetic Electrons in Solids

Download or read book Transport of Energetic Electrons in Solids written by Maurizio Dapor and published by Springer. This book was released on 2016-12-27 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition describes all the mechanisms of elastic and inelastic scattering of electrons with the atoms of the target as simple as possible. The use of techniques of quantum mechanics is described in detail for the investigation of interaction processes of electrons with matter. It presents the strategies of the Monte Carlo method, as well as numerous comparisons among the results of the simulations and the experimental data available in the literature. New in this edition is the description of the Mermin theory, a comparison between Mermin theory and Drude theory, a discussion about the dispersion laws, and details about the calculation of the phase shifts that are used in the relativistic partial wave expansion method. The role of secondary electrons in proton cancer therapy is discussed in the chapter devoted to applications. In this context, Monte Carlo results about the radial distribution of the energy deposited in PMMA by secondary electrons generated by energetic proton beams are presented.

Book Volume Microscopy

    Volume Microscopy

    Book Details:
  • Author : Irene Wacker
  • Publisher : Humana
  • Release : 2021-07-14
  • ISBN : 9781071606933
  • Pages : 306 pages

Download or read book Volume Microscopy written by Irene Wacker and published by Humana. This book was released on 2021-07-14 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume discusses different approaches to workflows for large volume electron microscopy - from preparation of samples to their imaging in a variety of microscopes - in some cases also applying correlative techniques. The chapters in this book cover topics such as correlative super resolution and electron microscopy to detect molecules in their native cellular context; low-threshold access to serial section arrays; improving serial blockface SEM by focal charge compensation; FIBSEM analysis of interfaces between hard technical devices and soft neuronal tissue; and image processing for volume electron microscopy. In Neuromethods series style, chapters include the kind of detail and key advice from the specialists needed to get successful results in your laboratory. Cutting-edge and authoritative, Volume Microscopy: Multiscale Imaging with Photons, Electrons, and Ions is a valuable resource for novice and expert scientists interested in learning more about this evolving field.

Book NBS Special Publication

Download or read book NBS Special Publication written by and published by . This book was released on 1968 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Publications of the National Institute of Standards and Technology Catalog

Download or read book Publications of the National Institute of Standards and Technology Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1983 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Airborne Measurements for Environmental Research

Download or read book Airborne Measurements for Environmental Research written by Manfred Wendisch and published by John Wiley & Sons. This book was released on 2013-03-22 with total page 659 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first comprehensive review of airborne measurement principles covers all atmospheric components and surface parameters. It describes the common techniques to characterize aerosol particles and cloud/precipitation elements, while also explaining radiation quantities and pertinent hyperspectral and active remote sensing measurement techniques along the way. As a result, the major principles of operation are introduced and exemplified using specific instruments, treating both classic and emerging measurement techniques. The two editors head an international community of eminent scientists, all of them accepted and experienced specialists in their field, who help readers to understand specific problems related to airborne research, such as immanent uncertainties and limitations. They also provide guidance on the suitability of instruments to measure certain parameters and to select the correct type of device. While primarily intended for climate, geophysical and atmospheric researchers, its relevance to solar system objects makes this work equally appealing to astronomers studying atmospheres of solar system bodies with telescopes and space probes.