Download or read book An Investigation of Titanium Silicide Formation Using Ion Beam Mixing written by and published by . This book was released on 1986 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Low Energy Ion Beam Modification of the Titanium Silicide 100 Reaction written by Philip Arthur Scott and published by . This book was released on 1992 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This research investigated the effects of the ion beam assisted deposition process on the interdiffusion and reaction of Ti thin films deposited on Si (100). The analytical techniques employed for the characterization of these thin films included transmission electron microscopy, scanning electron microscopy, scanning transmission electron microscopy, Auger electron spectroscopy, x-ray energy dispersive spectroscopy, and x-ray diffraction. The ion assisted deposition parameters which were investigated in this study include: ion energy, ion flux, ion to depositing atom ratio, evaporant atom flux, deposition time, average energy of bombardment per depositing atom, and substrate temperature. This research successfully demonstrated that the selection of ion beam assisted deposition process parameters is critical to producing films of a particular structure and chemistry. These films consist of a partially reacted Ti rich overlayer on a Si (100) substrate. For the ion to depositing (neutral) atom ratio: (1) the amount of interdiffusion or mixing increases with increasing ion to neutral ratio (in the absense of efficient point defect sinks) and (2) the reaction between Ti and Si (100) can be stimulated at low temperature by sufficiently high bombardment energy per depositing atom and (3) increasing the time of deposition results in the formation of a crystalline phase within the amorphous Ti silicide phase. For the ion flux: the effect of increasing ion flux during deposition results in increasing vacancy fluxes through the film during growth which consumes more Si. For the ion energies investigated (100, 200, and 400 eV): the reaction between Ti and Si (100) was more significant than evaporated films although the amount of the reaction and interdiffusion was independent of ion energy. For films deposited with a constant average bombardment energy per depositing atom: (1) the average bombardment energy per depositing atom does not characterize the deposition process sufficiently to determine the resultant film structure, and (2) the deposition rate is important for coupling the effects of ion induced defect production to the growth of the amorphous Ti silicide phase (by radiation enhanced diffusion) to thicknesses far in excess of any reported thermal reaction.
Download or read book ULSI Science and Technology 1989 written by C. M. Osburn and published by . This book was released on 1989 with total page 804 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific Bulletin written by and published by . This book was released on 1987 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Processing and Characterization of Materials Using Ion Beams Volume 128 written by Lynn E. Rehn and published by Mrs Proceedings. This book was released on 1989-04-19 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt: Author index.
Download or read book ONR Far East Scientific Bulletin written by and published by . This book was released on 1987 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Application of Ion Beams in Materials Science written by Takashi Sebe and published by . This book was released on 1988 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 1989 Spring Meeting written by Materials Research Society. Fall Meeting and published by . This book was released on 1989 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1994 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Induced Damage in Optical material 1985 written by and published by ASTM International. This book was released on with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Induced Damage in Optical Materials 1985 written by and published by . This book was released on 1988 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Swift Heavy Ions for Materials Engineering and Nanostructuring written by Devesh Kumar Avasthi and published by Springer Science & Business Media. This book was released on 2011-05-24 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beams have been used for decades for characterizing and analyzing materials. Now energetic ion beams are providing ways to modify the materials in unprecedented ways. This book highlights the emergence of high-energy swift heavy ions as a tool for tailoring the properties of materials with nanoscale structures. Swift heavy ions interact with materials by exciting/ionizing electrons without directly moving the atoms. This opens a new horizon towards the 'so-called' soft engineering. The book discusses the ion beam technology emerging from the non-equilibrium conditions and emphasizes the power of controlled irradiation to tailor the properties of various types of materials for specific needs.
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Download or read book Proceedings of the International Ion Engineering Congress written by and published by . This book was released on 1983 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer. This book was released on 1990-01-31 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS) * at Purdue University in 1 957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all con cerned if the printing and distribution of the volumes were handled by an interna tional publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Cor poration of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 32 (thesis year 1987) a total of 12,483 theses titles from 22 Canadian and 176 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this important annual reference work. While Volume 32 reports theses submitted in 1987, on occasion, certain univer sities do report theses submitted in previous years but not reported at the time.
Download or read book Extended Abstracts written by Electrochemical Society and published by . This book was released on 1989 with total page 994 pages. Available in PDF, EPUB and Kindle. Book excerpt:
