Download or read book 3 Dimensional Process Simulation written by J. Lorenz and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three-dimensional device simulation, and challenged by the great algorithmic problems caused by moving interfaces and by the requirement to limit computation times and memory requirements. A workshop (Erlangen, September 5, 1995) provided a forum to discuss the industrial needs, technical problems, and solutions being developed in the field of three-dimensional semiconductor process simulation. Invited presentations from leading semiconductor companies and research Centers of Excellence from Japan, the USA, and Europe outlined novel numerical algorithms, physical models, and applications in this rapidly emerging field.

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Download or read book Handbook of Microlithography Micromachining and Microfabrication Microlithography written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 780 pages. Available in PDF, EPUB and Kindle. Book excerpt: The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

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Download or read book Proceedings of the 14th International Conference on Flexible Automation and Intelligent Manufacturing written by Lihui Wang and published by NRC Research Press. This book was released on 2004 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book MEMS NANO and Smart Systems written by Li Yuan and published by Trans Tech Publications Ltd. This book was released on 2011-11-29 with total page 5400 pages. Available in PDF, EPUB and Kindle. Book excerpt: Selected, peer reviewed papers from the 2011 7th International Conference on MEMS, NANO and Smart Systems (ICMENS 2011), November 4-6, 2011, Kuala Lumpur, Malaysia

Download or read book Etching Deposition and Lithography Using Level Set Techniques written by David Adalsteinsson and published by . This book was released on 1995 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Process and Device Modeling for Microelectronics written by Giorgio Baccarani and published by Elsevier Publishing Company. This book was released on 1993 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 11 invited papers in this volume, written by experts in the field, report on current trends and significant research findings in the modeling and simulation of semiconductor devices and processes, monitoring the rapid scientific growth that has occurred in this area. The project "Materials and Devices for Solid-State Electronics" (MADESS), funded by Italy's National Research Council, started in 1987 and lasted 5 years. The project addressed five main research areas: VLSI Technology and Device Physics; Microwave and Optoelectronic Devices; Sensors; Semiconductor Power Devices; and Reliability and Diagnostics. Encompassing a large spectrum of activities ranging from material science to system architecture, research units included universities, public research laboratories and industry. The amount of resources made available by the project to the scientific community in the above areas has turned out to be a major impetus for growth in this scientific field. In addition, it has enhanced various forms of cooperation between research and industry, contributing to the development of a new consciousness concerning the role of microelectronics in modern society. The contributions in this volume are of worldwide interest, and will help to stimulate future research and analysis in this field.

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Download or read book Fast Optical and Process Proximity Correction Algorithms for Integrated Circuit Manufacturing written by Nicolas Bailey Cobb and published by . This book was released on 1998 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: