Download or read book Advances in Micro Nano Electromechanical Systems and Fabrication Technologies written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2013-05-29 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
Download or read book Micro Nano Electrochemical Systems and Fabrication Techniques Handbook written by Eve Versuh and published by . This book was released on 2015-01-27 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a collection of researches by various experts who share their analysis of current trends and future implications of micro-nano electrochemical systems. MEMS technology is progressively influencing and improving our quality of life. Simultaneously, progress in nanotechnology and nanomaterials has accelerated the growth of NEMS. This book consists of an analysis of modern technologies and their forthcoming developments. It focuses on the recent progress in devices and production procedures in the field of these miniaturized electromechanical structures. This book presents information about design, production and packaging; as well as solutions in these aspects for targeted functions. This book aims to help experts and students who are engaged in this field.
Download or read book Advanced MEMS NEMS Fabrication and Sensors written by Zhuoqing Yang and published by Springer Nature. This book was released on 2021-10-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
Download or read book Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators written by Evgeni Gusev and published by Springer. This book was released on 2010-03-03 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Download or read book Enabling Technology for MEMS and Nanodevices written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-27 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.
Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1998-01-01 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Download or read book Handbook of Nanosensors written by Gomaa A. M. Ali and published by Springer Nature. This book was released on with total page 1769 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advanced Drug Delivery written by Tuhin Subhra Santra and published by Springer Nature. This book was released on 2023-10-24 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of various drug delivery systems at the cellular level including biological, chemical methods, and most importantly physical methods such as photoporation, electroporation, mechanoporation, and device-based techniques (e.g., microfluidics), as well as organism-level techniques including nanomaterials, biomaterials, and transdermal. Drug delivery (DD) can be defined as the method and route by which an active pharmaceutical ingredient (API) is administered to promote its desired pharmacological effect and/or convenience and/or to reduce adverse effects. Drug delivery systems are developed to maximize drug efficacy and minimize side effects. As drug delivery technologies improve, the drug becomes safer and more comfortable for patients to use. During the last seven decades, extraordinary progress has been made in drug delivery technologies, such as systems for long-term delivery for months and years, localized delivery, and targeted delivery. The advances, however, will face the next phase considering the future technologies that we need to overcome many physicochemical barriers for new formulation development and biological unknowns for treating various diseases. Thus, various technologies are built at a single-cell level as well as an organism level. This book is useful at the university level for graduate courses or research studies and biotechnology-based companies with research and development on cell-based analysis, diagnosis, or drug screening. This book is also very useful for researchers in drug delivery technologies, which came in frontier research for the past decade.
Download or read book Si RF Technology written by Ayan Karmakar and published by Springer. This book was released on 2019-05-10 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the recent research developments of various passive microwave circuits on silicon substrate and demonstrated operations catering for multiple frequency bands. It covers the design, modelling, process fabrication and characterization aspects with practical examples. The book will be of use to researchers and engineers working in the field of RF or microwave engineering, who can use the techniques and approaches effectively without having to refer to multiple sources.
Download or read book Introduction To Modern Planar Transmission Lines written by Anand K. Verma and published by John Wiley & Sons. This book was released on 2021-06-02 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides a comprehensive discussion of planar transmission lines and their applications, focusing on physical understanding, analytical approach, and circuit models Planar transmission lines form the core of the modern high-frequency communication, computer, and other related technology. This advanced text gives a complete overview of the technology and acts as a comprehensive tool for radio frequency (RF) engineers that reflects a linear discussion of the subject from fundamentals to more complex arguments. Introduction to Modern Planar Transmission Lines: Physical, Analytical, and Circuit Models Approach begins with a discussion of waves on transmission lines and waves in material medium, including a large number of illustrative examples from published results. After explaining the electrical properties of dielectric media, the book moves on to the details of various transmission lines including waveguide, microstrip line, co-planar waveguide, strip line, slot line, and coupled transmission lines. A number of special and advanced topics are discussed in later chapters, such as fabrication of planar transmission lines, static variational methods for planar transmission lines, multilayer planar transmission lines, spectral domain analysis, resonators, periodic lines and surfaces, and metamaterial realization and circuit models. Emphasizes modeling using physical concepts, circuit-models, closed-form expressions, and full derivation of a large number of expressions Explains advanced mathematical treatment, such as the variation method, conformal mapping method, and SDA Connects each section of the text with forward and backward cross-referencing to aid in personalized self-study Introduction to Modern Planar Transmission Lines is an ideal book for senior undergraduate and graduate students of the subject. It will also appeal to new researchers with the inter-disciplinary background, as well as to engineers and professionals in industries utilizing RF/microwave technologies.
Download or read book Smart Biosensor Technology written by George K. Knopf and published by CRC Press. This book was released on 2018-11-15 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on the success of the first edition, this second edition continues to build upon fundamental principles of biosensor design and incorporates recent advances in intelligent materials and novel fabrication techniques for a broad range of real world applications. The book provides a multi-disciplinary focus to capture the ever-expanding field of biosensors. Smart Biosensor Technology, Second Edition includes contributions from leading specialists in a wide variety of fields with a common focus on smart biosensor design. With 21 chapters organized in five parts, this compendium covers the fundamentals of smart biosensor technology, important issues related to material design and selection, principles of biosensor design and fabrication, advances in bioelectronics, and a look at specific applications related to pathogen detection, toxicity monitoring, microfluidics and healthcare. Features Provides a solid background in the underlying principles of biosensor design and breakthrough technologies for creating more intelligent biosensors Focusses on material design and selection including cutting-edge developments in carbon nanotubes, polymer nanowires, and porous silicon Examines machine learning and introduces concepts such as DNA-based molecular computing for smart biosensor function Explores the principles of bioelectronics and nerve cell microelectrode arrays for creating novel transducers and physiological biosensors Devotes several chapters to biosensors developed to detect and monitor a variety of toxins and pathogens Offers expert opinions on the future directions, challenges and opportunities in the field
Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Download or read book Mems Nems written by Cornelius T. Leondes and published by Springer. This book was released on 2006-05-17 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
Download or read book RiTA 2020 written by Esyin Chew and published by Springer Nature. This book was released on 2021-09-05 with total page 443 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the Proceedings of the 8th International Conference on Robot Intelligence Technology and Applications (RITA 2020). The areas covered include: Instrumentation and Control, Automation, Autonomous Systems, Biomechatronics and Rehabilitation Engineering, Intelligent Systems, Machine Learning, Mobile Robotics, Social Robotics and Humanoid Robotics, Sensors and Actuators, and Machine Vision, as well as Signal and Image Processing. As a valuable asset, the book offers researchers and practitioners a timely overview of the latest advances in robot intelligence technology and its applications.
Download or read book Silicon Wet Bulk Micromachining for MEMS written by Prem Pal and published by CRC Press. This book was released on 2017-04-07 with total page 315 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
