- Author : S. P. Murarka
- Publisher :
- Release : 1998-11-02
- ISBN :
- Pages : 596 pages
Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits Volume 514
Download or read book Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits Volume 514 written by S. P. Murarka and published by . This book was released on 1998-11-02 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprising the proceedings of an MRS symposium held in April of 1998, contributions in this volume are divided into ten sections: interconnection frontiers; aluminum interconnects; cobalt and other silicides; titanium silicide; MOSFET, source, drain, and interconnect engineering; copper interconnects and barriers; a poster session on advanced interconnects and contacts; contacts to compound semiconductor devices; novel interconnect materials and schemes; and diffusion barriers. Annotation copyrighted by Book News, Inc., Portland, OR