Download or read book A Study of the Spatial Characteristics of a Laser Plasma Extreme UV Continuum Source for Absorption Spectroscopy written by Christopher Joseph Moloney and published by . This book was released on 1998 with total page 123 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Time resolved Visible and Extreme Ultraviolet Spectroscopy of Laser produced Tin Plasma written by Joseph Fred O'Shay and published by . This book was released on 2007 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the final section of this study, we investigate the radiative properties of tin ablation plasma as the laser irradiance is varied by more than an order of magnitude. The effect of increased focused laser energy is manifested in a weak scaling of radiation temperature, and a significant broadening of the emission lifetime at the highest laser intensities. It is found that the resulting radiation conversion efficiency is not a strong function of laser intensity within the parameter regime of this work. It is shown that agreement between experimental and simulated plasma conditions becomes progressively worse in the high-irradiance regime as the ionization and radiative transfer models play increasingly dominant roles in the plasma energetics.
Download or read book Ultraviolet Spectroscopy And Uv Lasers written by Prabhakar Misra and published by CRC Press. This book was released on 2002-02-25 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a complete and thorough examination of advances in the instrumentation, evaluation, and implementation of UV technology for reliable and efficient data acquisition and analysis. It provides real-world applications in expanding fields such as chemical physics, plasma science, photolithography, laser spectroscopy, astronomy and atmospheric science.
Download or read book Laser Techniques in Extreme Ultraviolet written by Stephen Ernest Harris and published by American Institute of Physics. This book was released on 1984 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Experimental Investigation of the Emission of High brightness Extreme Ultraviolet Radiation from Laser plasma Interactions written by Lewis Ramsay Reid and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: To date, theoretical and experimental work on radiation production from the laser wakefield accelerator has focussed on the emission of few keV to 1 MeV photons from electrons undergoing betatron oscillations inside the plasma structure. This thesis, in contrast, presents one of the first experimental investigations of radiation emitted at extreme ultraviolet wavelengths approaching the water window. The spectral, spatial and coherence properties of radiation beams produced by the laser plasma interaction are measured. In addition, a Kirkpatrick-Baez microscope focusing optic is developed for proof-of-principle application experiments to demonstrate the usefulness of the source. The spectra of hard x-ray betatron radiation is measured and first tests of the Kirkpatrick-Baez microscope undertaken to focus the radiation to a small spot size.
Download or read book Journal of the Optical Society of America written by Optical Society of America and published by . This book was released on 1981 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Engineering written by and published by . This book was released on 1994-10 with total page 1062 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.
Download or read book Laser Plasma Radiation Studies for Droplet Sources in the Extreme Ultraviolet written by Reuvani D. Kamtaprasad and published by . This book was released on 2010 with total page 73 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advancement of laboratory based Extreme Ultraviolet (EUV) radiation has escalated with the desire to use EUV as a source for semiconductor device printing. Laser plasmas based on a mass-limited target concept, developed within the Laser Plasma Laboratory demonstrate a much needed versatility for satisfying rigorous source requirements. This concept produces minimal debris concerns and allows for the attainment of high repetition rates as well as the accommodation of various laser and target configurations. This work demonstrates the generation of EUV radiation by creating laser plasmas from mass-limited targets with indium, tin, and antimony doped droplets. Spectral emission from the laser plasmas is quantified using a flat-field spectrometer. COWAN code oscillator strength predications for each of the dopants were convolved with narrow Gaussian functions creating synthetic spectra for the EUV region between 10 nm - 20 nm. A preliminary comparison was made between the theoretical spectra and experimental results. From this comparison, ion stage transitions for each of the hot dense plasmas generated were assessed.
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1993 with total page 938 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1991 with total page 1460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book Ultraviolet Spectroscopy And Uv Lasers written by Prabhakar Misra and published by CRC Press. This book was released on 2002-02-25 with total page 569 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a complete and thorough examination of advances in the instrumentation, evaluation, and implementation of UV technology for reliable and efficient data acquisition and analysis. It provides real-world applications in expanding fields such as chemical physics, plasma science, photolithography, laser spectroscopy, astronomy and atmospheric science.
Download or read book Plasma Physics Index written by and published by . This book was released on 1981 with total page 834 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A Study of the Large scale Structure of the Plasmasphere Using Extreme Ultraviolet Observations written by Supriya Chakrabarti and published by . This book was released on 1982 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1058 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Extreme ultraviolet Radiation Transport in Small Scale Length Laser produced Tin Plasmas written by Kevin Lamar Williams Sequoia and published by . This book was released on 2009 with total page 179 pages. Available in PDF, EPUB and Kindle. Book excerpt: The majority of the studies on laser-produced plasmas as an efficient extreme ultraviolet (EUV) light source have focused on relatively large plasmas produced at large laser facilities. However, to develop a commercially viable light source for EUV lithography, much smaller lasers and hence much smaller plasmas must be employed. Smaller plasmas behave quite differently than large plasmas in that the temperature and density are less uniform, and lateral expansion is more important. These differences affect the energy transport and, in particular, the radiation transport. This work studies the EUV radiation transport in small scale length tin plasmas, focusing on the effects of target geometry and laser pulse duration. Both planar and spherical tin targets were irradiated with an Nd:YAG laser operating at 1.064 [Mu]m. Conversion efficiency of laser light to 13.5 nm radiation (in-band), EUV emission spectrum, two-dimensional in-band emission profile, and the plasma electron density were measured experimentally. These measurements provide insight into where the laser is absorbed, where the in-band emission is produced, and how the radiation is transmitted. The plasma evolution in these experiments were simulated with a two-dimensional radiation hydrodynamic code, while the radiation transport and atomic kinetics where modeled with a collisional radiative code. Additional experiments were conducted using planar targets where the pulse duration was varied from 0.5 ns to 16 ns to understand the effects of laser pulse duration. It was found that the optimum plasma temperature for efficient generation and transmission of in-band emission is 20 eV. This is lower than the previously reported optimum temperature of 30 eV. The use of a 1.064 [Mu]m heating laser results in overheating of the plasma in a region that is much too dense to transmit the in-band emission. This overheating is necessary for the plasma to reach the optimum temperature in the region where the density is low enough to transmit the in-band emission.
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Download or read book Coherence Tunability Spectral and Spatial Properties of Femtosecond Extreme ultraviolet Light Sources written by Benoît Mahieu and published by . This book was released on 2013 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt:
