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Book A New Mechanical Characterization Method for Thin Film Microactuators and Its Application to NiTiCi Shape Memory Alloy

Download or read book A New Mechanical Characterization Method for Thin Film Microactuators and Its Application to NiTiCi Shape Memory Alloy written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: In an effort to develop a more full characterization tool of shape memory alloys, a new technique is presented for the mechanical characterization of microactuators and applied to SMA thin films. A test instrument was designed to utilize a spring-loaded transducer in measuring displacements with resolution of 1.5 pm and forces with resolution of 0.2 mN. Employing an out-of-plane loading method for freestanding SMA thin films, strain resolution of 30[mu][epsilon] and stress resolution of 2.5 MPa were achieved. This new testing method is presented against previous SMA characterization methods for purposes of comparison. Four mm long, 2[micro]m thick NiTiCu ligaments suspended across open windows were bulk micromachined for use in the out-of-plane stress and strain measurements. The fabrication process used to micromachine the ligaments is presented step-by-step, alongside methods of fabrication that failed to produce testable ligaments. Static analysis showed that 63% of the applied strain was recovered while ligaments were subjected to tensile stresses of 870 MPa. In terms of recoverable stress and recoverable strain, the ligaments achieved maximum recovery of 700 MPa and 3.0% strain. No permanent deformations were seen in any ligament during deflection measurements. Maximum actuation forces and displacements produced by the 4 mm ligaments situated on 1 cm square test chips were 56 mN and 300[micro]m, respectively. Fatigue analysis of the ligaments showed degradation in recoverable strain from 0.33% to 0.24% with 200,000 cycles, corresponding to deflections of 90[micro]m and forces of 25 mN. Cycling also produced a wavering shape memory effect late in ligament life, leading to broad inconsistencies of as much as 35% deviation from average. Unexpected phenomena like stress-induced martensitic twinning that leads to less recoverable stress and the shape memory behavior of long life devices are addressed. Finally, a model for design of microactuators using shape memory alloys is presented to illustrate how results obtained from these tests can be interpreted and applied to the creation of MEMS devices.

Book A New Mechanical Characterization Method for Thin Film Microactuators and Its Application to NiTiCu Shape Memory Alloy

Download or read book A New Mechanical Characterization Method for Thin Film Microactuators and Its Application to NiTiCu Shape Memory Alloy written by Kirk Patrick Seward and published by . This book was released on 1999 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book A New Mechanical Characterization Method for Microactuators Applied to Shape Memory Films

Download or read book A New Mechanical Characterization Method for Microactuators Applied to Shape Memory Films written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: We present a new technique for the mechanical characterization of microactuators and apply it to shape memory alloy (SMA) thin films. A test instrument was designed which utilizes a spring-loaded transducer to measure displacements with resolution of 1.5 mm and forces with resolution of 0.2 mN. Employing an out- of-plane loading method for SMA thin films, strain resolution of 30 me and stress resolution of 2.5 MPa were achieved. Four mm long, 2 [mu]m thick NiTiCu ligaments suspended across open windows were bulk micromachined for use in the out-of-plane stress and strain measurements. Static analysis showed that 63% of the applied strain was recovered while ligaments were subjected to tensile stresses of 870 MPa. This corresponds to 280 mm of actual displacement against a load of 52 mN. Fatigue analysis of the ligaments showed 33% degradation in recoverable strain (from 0.3% to 0.2%) with 2 ± 104 cycles for an initial strain of 2.8%.

Book Shape Memory Microactuators

Download or read book Shape Memory Microactuators written by Manfred Kohl and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 265 pages. Available in PDF, EPUB and Kindle. Book excerpt: Overview of recent achievements, describing the microactuator development of microvalves and liner actuators comprehensively from concept through prototype. Further key aspects included are three-dimensional models for handling complex SMA actuator geometries and coupled simulation routines that take multifunctional properties into account. Mechanical and thermal optimization criteria are introduced for actuator design, allowing an optimum use of the shape memory effect. It is shown that some of the prototypes presented, e.g. SMA microgrippers, already outperform conventional components.

Book Shape Memory Alloy Actuators

Download or read book Shape Memory Alloy Actuators written by Mohammad H. Elahinia and published by John Wiley & Sons. This book was released on 2016-01-19 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a systematic approach to realizing NiTi shape memory alloy actuation, and is aimed at science and engineering students who would like to develop a better understanding of the behaviors of SMAs, and learn to design, simulate, control, and fabricate these actuators in a systematic approach. Several innovative biomedical applications of SMAs are discussed. These include orthopedic, rehabilitation, assistive, cardiovascular, and surgery devices and tools. To this end unique actuation mechanisms are discussed. These include antagonistic bi-stable shape memory-superelastic actuation, shape memory spring actuation, and multi axial tension-torsion actuation. These actuation mechanisms open new possibilities for creating adaptive structures and biomedical devices by using SMAs.

Book Development of Microactuators Based on the Magnetic Shape Memory Effect

Download or read book Development of Microactuators Based on the Magnetic Shape Memory Effect written by Yeduru, Srinivasa Reddy and published by KIT Scientific Publishing. This book was released on 2013-12-10 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: The giant magneto-strain effect in Ni-Mn-Ga alloys is particularly attractive for actuator applications. Two different approaches are being pursued to develop MSM microactuators. To observe large deflections of Ni-Mn-Ga microactuators, the material should be exhibiting low twinning stress and large magnetic anisotropy. In addition, design rules and boundary conditions for operating the Ni-Mn-Ga actuator material are having significant importance for evolution of performance characteristics.

Book Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators

Download or read book Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators written by Cory R. Knick and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The miniaturization of engineering devices has created interest in new actuation methods capable of large displacements and high frequency responses. Shape memory alloy (SMA) thin films have exhibited one of the highest power densities of any material used in these actuation schemes and can thermally recovery strains of up to 10%. Homogenous SMA films can experience reversible shape memory effect, but without some sort of physical biasing mechanism, the effect is only one-way. SMA films mated in a multi-layer stack have the appealing feature of an intrinsic two-way shape memory effect (SME). In this work, we developed a near-equiatomic NiTi magnetron co-sputtering process and characterized shape memory effects. We mated these SMA films in several ,Äúbimorph,Äù configurations to induce out of plane curvature in the low-temperature Martensite phase. We quantify the curvature radius vs. temperature on MEMS device structures to elucidate a relationship between residual stress, recovery stress, radius of curvature, and degree of unfolding. We fabricated and tested laser-irradiated and joule heated SMA MEMS actuators to enable rapid actuation of NiTi MEMS devices, demonstrating some of the lowest powers (5,Äì15 mW) and operating frequencies (1,Äì3 kHz) ever reported for SMA or other thermal actuators.

Book Thin Film NiTi Shape Memory Alloy Microactuators

Download or read book Thin Film NiTi Shape Memory Alloy Microactuators written by John J. Gill and published by . This book was released on 2001 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Thermomechanical Response of Shape Memory Alloy Hybrid Composites

Download or read book Thermomechanical Response of Shape Memory Alloy Hybrid Composites written by Travis L. Turner and published by DIANE Publishing. This book was released on 2001 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: This study examines the use of embedded shape memory alloy (SMA) actuators for adaptive control of the thermomechanical response of composite structures. A nonlinear thermomechanical model is presented for analyzing shape memory alloy hybrid composite (SMAHC) structures exposed to steady-state thermal and dynamic mechanical loads. Also presented are (1) fabrication procedures for SMAHC specimens, (2) characterization of constituent materials for model quantification, (3) development of the test apparatus for conducting static and dynamic experiments on specimens with and without SMA, (4) discussion of the experimental results, and (5) validation of the analytical and numerical tools developed in the study. Excellent agreement is achieved between the predicted and measured SAMHC responses including thermal buckling, thermal post-buckling and dynamic response due to inertial loading.

Book Microactuators and Micromechanisms

Download or read book Microactuators and Micromechanisms written by Erwin-Christian Lovasz and published by Springer. This book was released on 2015-04-02 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains applications of micromechanisms and microactuators in several very modern technical fields such as mechatronics, biomechanics, machines, micromachines, robotics and apparatuses. In connection with its topic, the work combines the theoretical results with experimental tests on micromechanisms and microactuators. The book presents the most recent research advances in Machine and Mechanisms Science. It includes the accepted reviewed papers of researchers specialized in the topics of the conference: microactuators and micro-assembly, micro sensors involving movable solids, micro-opto-mechanical devices, mechanical tools for cell and tissue studies, micromanipulation and micro-stages, micro-scale flight and swimming, micro-robotics and surgical tools, micron-scale power generation, miniature manufacturing machines, micromechatronics and micro-mechanisms, biomechanics micro and nano scales and control issues in microsystems. The presented applications of micromechanisms and microactuators in many technical fields will interest industrial companies and encourage scientifical knowledge and cooperation between academia and industry.

Book Microactuators

Download or read book Microactuators written by Massood Tabib-Azar and published by Springer Science & Business Media. This book was released on 1997-12-31 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: 219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.

Book Meso  to Micro  Actuators

Download or read book Meso to Micro Actuators written by Alberto Borboni and published by CRC Press. This book was released on 2008-05-05 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Exploring the design and use of micro- and meso-actuators, this book begins with theory and a general synopsis of the state-of-the-art in theoretical research. It discusses how to employ modern approaches in research and design activity, then presents a systematic list of already available products and details their potential for use. Design possibilities based on new technologies are clearly separated from those due to scale reduction, aiding in the selection of proper technology. The author takes a multi-physic approach to guarantee a comprehensive modeling technique, while the many references to experimental data and to existing microacutators assure an effective applicability of proposed theories.

Book Preparation of Shape memory alloy thin Film for Actuator

Download or read book Preparation of Shape memory alloy thin Film for Actuator written by Cengling Zhang and published by . This book was released on 2001 with total page 89 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Julebladet  H  rning st

Download or read book Julebladet H rning st written by and published by . This book was released on 1907 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Microactuators  Microsensors and Micromechanisms

Download or read book Microactuators Microsensors and Micromechanisms written by Lena Zentner and published by Springer Nature. This book was released on 2020-10-13 with total page 149 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Book Design of Shape Memory Alloy  SMA  Actuators

Download or read book Design of Shape Memory Alloy SMA Actuators written by Ashwin Rao and published by Springer. This book was released on 2015-05-08 with total page 137 pages. Available in PDF, EPUB and Kindle. Book excerpt: This short monograph presents an analysis and design methodology for shape memory alloy (SMA) components such as wires, beams, and springs for different applications. The solid-solid, diffusionless phase transformations in thermally responsive SMA allows them to demonstrate unique characteristics like superelasticity and shape memory effects. The combined sensing and actuating capabilities of such materials allows them to provide a system level response by combining multiple functions in a single material system. In SMA, the combined mechanical and thermal loading effects influence the functionality of such materials. The aim of this book is to make the analysis of these materials accessible to designers by developing a "strength of materials" approach to the analysis and design of such SMA components inspired from their various applications with a review of various factors influencing the design process for such materials.