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Download or read book 2000 5th International Symposium on Plasma Process Induced Damage written by Ōyō Butsuri Gakkai and published by IEEE. This book was released on 2000 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.

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Download or read book 1996 1st International Symposium on Plasma Process Induced Damage written by Kin P. Cheung and published by IEEE. This book was released on 1996 with total page 237 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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